# US 2014/0197305 A1 · Optical apparatus, light sensitive device with micro-lens and manufacturing method thereof

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- Number: US 2014/0197305 A1
- Document ID: US20140197305A1
- Status: Published application
- Kind: A1
- Application number: 14/145,019
- Filed: 2013-12-31
- Published: 2014-07-17
- Earliest claimed: 2013-01-11
- Assignees: Pixart Imaging Inc.
- Applicants: Pixart Imaging Inc.
- Inventors: EN-FENG HSU; CHIA-YU LIU; CHING-WEI CHEN
- Web page: https://patentgrep.com/patent/US20140197305A1

## CPC

- G01S 17/04: Systems determining the presence of a target
- G01S 7/4813: {Housing arrangements}
- H10F 77/407: {indirectly associated with the devices}
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

There is provided an optical apparatus including a substrate, a light emitting device, a light sensitive device and a plurality of micro-lenses. The light emitting device is disposed on the substrate and adapted to provide a light beam. The light sensitive device is disposed on the substrate and adapted to receive a light beam reflected from an object, wherein the light sensitive device has a plurality of photosensitive units arranged in matrix. The micro-lenses are disposed above the light sensitive device and respectively opposite to the associated photosensitive units. There is further provided a light sensitive device with micro-lens and a manufacturing method thereof.

## Claims

### Claim 1

An optical apparatus, configured to detect an object, the optical apparatus comprising:
a substrate;
a light emitting device disposed on the substrate and adapted to provide a light beam;
a light sensitive device comprising a plurality of photosensitive units arranged in matrix, disposed on the substrate and adapted to receive a reflected light beam formed by the object reflecting the light beam; and
a plurality of micro-lenses disposed above the light sensitive device and respectively opposite to the photosensitive units.

### Claim 2 (depends on 1)

The optical apparatus as claimed in claim 1, further comprising a light blocking stack layer disposed on the light sensitive device, wherein the light blocking stack layer comprises a plurality of light passages associated with the photosensitive units and inclining toward a direction away from a center of the light sensitive device configured to limit an incident angle of the reflected light beam impinging on the photosensitive units.

### Claim 3 (depends on 2)

The optical apparatus as claimed in claim 2, wherein the light blocking stack layer is between the micro-lenses and the light sensitive device.

### Claim 4 (depends on 2)

The optical apparatus as claimed in claim 2, wherein the light blocking stack layer comprises a transparent material layer and an opaque stack layer, and the transparent material layer is served as the light passages.

### Claim 5 (depends on 4)

The optical apparatus as claimed in claim 4, wherein the opaque stack layer is made of light absorbing material.

### Claim 6 (depends on 2)

The optical apparatus as claimed in claim 2, wherein the incident angle is positively correlated with a distance between the light passages and the center of the light sensitive device.

### Claim 7 (depends on 2)

The optical apparatus as claimed in claim 2, wherein each of the photosensitive units is associated with at least one of the light passages.

### Claim 8 (depends on 2)

The optical apparatus as claimed in claim 2, wherein each of the photosensitive units is associated with a plurality of the light passages, and the incident angles of the reflected light beam limited by the light passages associated with the same photosensitive unit are identical.

### Claim 9 (depends on 1)

The optical apparatus as claimed in claim 1, wherein the micro-lenses are spherical asymmetry.

### Claim 10 (depends on 1)

The optical apparatus as claimed in claim 1, wherein the micro-lenses are spherical symmetry and a gravity center of the micro-lenses has an offset from the associated photosensitive units toward a direction away from a center of the light sensitive device.

### Claim 11 (depends on 10)

The optical apparatus as claimed in claim 10, wherein the offset is positively correlated with a distance between the micro-lenses and the center of the light sensitive device.

### Claim 12 (depends on 1)

The optical apparatus as claimed in claim 1, wherein each of the photosensitive units comprises at least one photodiode.

### Claim 13

A manufacturing method of a light sensitive device with micro-lens, comprising:
providing a light sensitive device which comprises a plurality of photosensitive units arranged in matrix;
forming a protection layer on the light sensitive device;
forming at least two patterned metal layers on the protection layer so as to form a plurality of light passages, wherein the light passages are associated with the photosensitive units respectively; and
forming a plurality of micro-lenses opposite to the light passages.

### Claim 14 (depends on 13)

The manufacturing method as claimed in claim 13, wherein a part of the light passages have a tilt angle toward a direction away from a center of the light sensitive device.

### Claim 15 (depends on 14)

The manufacturing method as claimed in claim 14, wherein the tilt angle is positively correlated with a distance between the light passages and the center of the light sensitive device.

### Claim 16 (depends on 13)

The manufacturing method as claimed in claim 13, wherein a gravity center of a part of the micro-lenses has an offset from the associated photosensitive units toward a direction away from a center of the light sensitive device.

### Claim 17 (depends on 16)

The manufacturing method as claimed in claim 16, wherein the offset is positively correlated with a distance between the micro-lenses and the center of the light sensitive device.

### Claim 18

A light sensitive device with micro-lens, comprising:
a plurality of photosensitive units arranged in matrix;
a light blocking stack layer forming on the photosensitive units and comprising a plurality of light passages associated with the photosensitive units respectively, wherein a part of the light passages have a tilt angle toward a direction away from a matrix center; and
a plurality of micro-lenses disposed on the light blocking stack layer and opposite to the light passages respectively.

### Claim 19 (depends on 18)

The light sensitive device as claimed in claim 18, wherein a tilt angle is positively correlated with a distance between the light passages and the matrix center.

### Claim 20 (depends on 18)

The light sensitive device as claimed in claim 18, wherein a gravity center of the micro-lenses has an offset from the associated photosensitive units toward a direction away from the matrix center.
