# US 2014/0197036 A1 · Mold production method

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- Number: US 2014/0197036 A1
- Document ID: US20140197036A1
- Status: Published application
- Kind: A1
- Application number: 14/008,649
- Filed: 2012-03-29
- Published: 2014-07-17
- Earliest claimed: 2011-04-01
- Assignees: Geomatec Co., Ltd.; Sharp Kabushiki Kaisha
- Inventors: Akinobu Isurugi; Kiyoshi Minoura; Hiroyuki Sugawara
- Web page: https://patentgrep.com/patent/US20140197036A1

## CPC

- G02B 1/118: having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
- B29C 33/38: characterised by the material or the manufacturing process (B29C33/44 takes precedence)
- B29C 33/42: characterised by the shape of the moulding surface, e.g. ribs or grooves
- C25D 1/10: Moulds; Masks; Masterforms
- C25D 11/04: of aluminium or alloys based thereon
- C25D 11/045: {for forming AAO templates}
- C25D 11/12: Anodising more than once, e.g. in different baths
- C25D 11/24: Chemical after-treatment
- B29C 59/046: {for layered or coated substantially flat surfaces}
- B29C 2035/0827: {using UV radiation}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00)
- C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR

## Abstract

A method for manufacturing a moth-eye mold of an embodiment of the present invention employs a mold base including a metal base, an organic insulating layer provided on the metal base, and an aluminum alloy layer provided on the organic insulating layer, the aluminum alloy layer containing aluminum and a non-aluminum metal element M, an absolute value of a difference between a standard electrode potential of the metal element M and a standard electrode potential of aluminum being not more than 0.64 V, and a content of the metal element M in the aluminum alloy layer not exceeding 10 mass %.

## Claims

### Claim 1

A method for manufacturing a mold which has an inverted moth-eye structure over its surface, the inverted moth-eye structure having a plurality of recessed portions whose two-dimensional size viewed in a direction normal to its surface is not less than 10 nm and less than 500 nm, the method comprising the steps of:
(a) providing a mold base, the mold base including a metal base, an organic insulating layer provided on the metal base, and an aluminum alloy layer provided on the organic insulating layer, the aluminum alloy layer containing aluminum and a non-aluminum metal element M, an absolute value of a difference between a standard electrode potential of the metal element M and a standard electrode potential of aluminum being not more than 0.64 V, and a content of the metal element M in the aluminum alloy layer not exceeding 10 mass %;
(b) partially anodizing the aluminum alloy layer to form a porous alumina layer which has a plurality of minute recessed portions;
(c) after step (b), bringing the porous alumina layer into contact with an etching solution, thereby enlarging the plurality of minute recessed portions of the porous alumina layer; and
(d) after step (c), further performing anodization to grow the plurality of minute recessed portions.

### Claim 2 (depends on 1)

The method of claim 1, wherein the metal element M is a metal element which is nobler than aluminum.

### Claim 3 (depends on 1)

The method of claim 1, wherein the metal element M is a metal element which is less noble than aluminum.

### Claim 4 (depends on 1)

The method of claim 1, wherein the mold base further includes an inorganic underlayer interposed between the organic insulating layer and the aluminum alloy layer.

### Claim 5 (depends on 4)

The method of claim 4, wherein the mold base further includes a buffer layer interposed between the inorganic underlayer and the aluminum alloy layer, the buffer layer containing aluminum, the metal element M, and either of oxygen or nitrogen.

### Claim 6 (depends on 5)

The method of claim 5, wherein the buffer layer has such a profile that the contents of aluminum and the metal element M in the buffer layer are higher in a portion which is closer to the aluminum alloy layer than in another portion which is closer to the inorganic underlayer.

### Claim 7 (depends on 4)

The method of claim 4, wherein the inorganic underlayer is a silicon oxide layer or a titanium oxide layer.

### Claim 8 (depends on 1)

The method of claim 1, wherein the organic insulating layer is an electrodeposition layer.

### Claim 9 (depends on 1)

The method of claim 1, wherein the metal base is in the form of a hollow cylinder, and the organic insulating layer is provided over an outer perimeter surface of the hollow cylinder of the metal base.

### Claim 10 (depends on 1)

The method of claim 1, wherein step (b) and step (c) are further performed after step (d).

### Claim 11 (depends on 1)

A method for producing an antireflection film, comprising the steps of:
providing a mold which is manufactured according to the manufacturing method of claim 1;
providing a work;
irradiating a photocurable resin interposed between the mold and a surface of the work with light, thereby curing the photocurable resin; and
peeling off the mold from an antireflection film which is formed by the cured photocurable resin.
