# US 2014/0196935 A1 · Ceramic substrate and process for producing same

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- Number: US 2014/0196935 A1
- Document ID: US20140196935A1
- Status: Published application
- Kind: A1
- Application number: 14/235,529
- Filed: 2013-03-12
- Published: 2014-07-17
- Earliest claimed: 2012-03-14
- Assignees: Ngk Spark Plug Co., Ltd.
- Applicants: Ngk Spark Plug Co., Ltd.
- Inventors: Takatoshi Tojo; Shinji Suzumura; Yoshitaka Yoshida; Masahiro Ogawa
- Web page: https://patentgrep.com/patent/US20140196935A1

## CPC

- H05K 1/0306: {Inorganic insulating substrates, e.g. ceramic, glass}
- H05K 3/10: in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H10W 76/60: Seals
- H10W 70/655: Fan-out layouts
- H10W 76/18: Insulating materials, e.g. resins, glasses or ceramics
- H10W 90/724: {between a chip and a stacked insulating package substrate, interposer or RDL}
- Y10T 29/49155: Manufacturing circuit on or in base
- Y10T 29/49165: by forming conductive walled aperture in base
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A ceramic substrate includes a substrate body formed of ceramic and having a pair of surfaces each assuming a rectangular shape as viewed in plane, and a metallization layer formed on the surface of the substrate body and adapted to braze a metal frame thereon. A composite material layer is disposed between the surface of the substrate body and the metallization layer and is formed such that a ceramic portion, a metal portion 10m formed of a metal similar to a metal component of the metallization layer or a metal which, together with a metal component of the metallization layer, forms an all proportional solid solution, and a glass portion exist together. The thickness of the composite material layer is thinner than that of the metallization layer. A plating layer is deposited on the surface of the metallization layer.

## Claims

### Claim 1

A ceramic substrate comprising
a substrate body formed of ceramic and having a pair of surfaces each assuming a rectangular shape as viewed in plane, and
a metallization layer formed on at least one of the surfaces of the substrate body and adapted to mount a metal member thereon, and
characterized in that
a composite material layer is formed between the surface of the substrate body and the metallization layer and is formed such that a ceramic portion, a metal portion formed of a metal similar to a metal component of the metallization layer or a metal which, together with a metal component of the metallization layer, forms an all proportional solid solution, and a glass portion exist together,
a thickness of the composite material layer is thinner than a thickness of the metallization layer, and
a plating layer is deposited on a surface of the metallization layer.

### Claim 2 (depends on 1)

A ceramic substrate according to claim 1, wherein the composite material layer is formed on the entirety of the surface of the substrate body.

### Claim 3 (depends on 1)

A ceramic substrate according to claim 1, wherein a cavity having a rectangular shape as viewed in plane opens at a central portion of the surface of the substrate body, and the metallization layer and the composite material layer are formed on the surface of the substrate body at a portion excluding the cavity.

### Claim 4 (depends on 1)

A ceramic substrate according to claim 1, wherein a metal frame having a rectangular shape as viewed in plane is joined onto the plating layer via a brazing material.

### Claim 5 (depends on 2)

A ceramic substrate according to claim 2, wherein the composite material layer contains the metal portion in an amount of 3 vol % to 20 vol % and the ceramic portion and the glass portion as balance.

### Claim 6 (depends on 3)

A ceramic substrate according to claim 3, wherein the composite material layer contains the metal portion in an amount greater than 20 vol % to 80 vol % and the ceramic portion and the glass portion as balance.

### Claim 7 (depends on 1)

A ceramic substrate according to claim 1, wherein the composite material layer is a laminate of one or more partial composite material layers which differ in mixing ratio of the ceramic portion, the metal portion, and the glass portion.

### Claim 8 (depends on 1)

A ceramic substrate according to claim 1, wherein the composite material layer is formed on the surface of the substrate body at at least four corner portions of the surface.

### Claim 9 (depends on 1)

A method of manufacturing a ceramic substrate according to claim 1, characterized by comprising:
a step of forming a composite material layer composed of a ceramic portion, a metal portion, and a glass portion on the entirety of at least one surface of a pair of surfaces, each having a rectangular shape as viewed in plane, of a ceramic green sheet,
a step of forming a metallization layer on an upper surface of the composite material layer, and
a step of depositing a plating layer on a surface of the metallization layer.

### Claim 10 (depends on 3)

A method of manufacturing a ceramic substrate according to claim 3, characterized by comprising:
a step of forming a composite material layer composed of a ceramic portion, a metal portion, and a glass portion on the entirety of one surface of a pair of surfaces, each having a rectangular shape as viewed in plane, of an upper ceramic green sheet,
a step of forming a metallization layer on an upper surface of the composite material layer,
a step of punching out, along a thickness direction, a central portion of the upper ceramic green sheet on which the composite material layer and the metallization layer) are formed, thereby forming a through-hole having a rectangular shape as viewed in plane, and
a step of laminating a flat lower ceramic green sheet to cover the through-hole on a back surface of the upper ceramic green sheet, and
a step of depositing a plating layer on the surface of the metallization layer, the surface having a rectangular shape as viewed in plane as a result of performing the step of forming the through-hole.

### Claim 11 (depends on 9)

A method of manufacturing a ceramic substrate according to claim 9, characterized in that
as viewed in plane, the ceramic green sheet is composed of a product region where a plurality of substrate regions which are to become ceramic substrates are juxtaposed adjacently in rows and columns, and a edge portion having the form of a rectangular frame and located around the product region, and
the metallization layer is formed along four sides of the composite material layer in each of the substrate regions.

### Claim 12 (depends on 10)

A method of manufacturing a ceramic substrate according to claim 10, characterized in that
as viewed in plane, each of the upper and lower ceramic green sheets is composed of a product region where a plurality of substrate regions which are to become ceramic substrates are juxtaposed adjacently in rows and columns, and a edge portion having the form of a rectangular frame and located around the product region, and
the step of forming the through-hole is performed on the upper ceramic green sheet on which the composite material layer and the metallization layer are formed, at a central portion of each of the substrate regions.

### Claim 13 (depends on 9)

A method of manufacturing a ceramic substrate according to claim 9, characterized by having a step of joining a metal frame having the form of a rectangular frame as viewed in plane onto the plating layer via a brazing material after completion of the steps.
