# US 2014/0196849 A1 · Inductively coupled plasma source > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0196849 A1 - Document ID: US20140196849A1 - Status: Published application - Kind: A1 - Application number: 13/833,220 - Filed: 2013-03-15 - Published: 2014-07-17 - Earliest claimed: 2013-01-11 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: ANDREW NGUYEN; KARTIK RAMASWAMY; YANG YANG; STEVEN LANE - Web page: https://patentgrep.com/patent/US20140196849A1 ## CPC - H01J 37/321: {the radio frequency energy being inductively coupled to the plasma} - H01J 37/3211: {Antennas, e.g. particular shapes of coils} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract Embodiments of methods and apparatus for plasma processing are provided herein. In some embodiments, an inductively coupled plasma apparatus may include a bottom wall comprising a hub and a ring coupled to the hub by a capacitor, wherein the hub and the ring are each electrically conductive, and where the hub has a central opening aligned with a central axis of the inductively coupled plasma apparatus; a top wall spaced apart from and above the bottom wall, wherein the top wall has a central opening aligned with the central axis, and wherein the tope wall is electrically conductive; a sidewall electrically connecting the ring to the top wall; and a tube electrically connecting the hub to the top wall, the tube having a central opening aligned with the central axis. ## Claims ### Claim 1 An inductively coupled plasma apparatus, comprising: a bottom wall comprising a hub and a ring coupled to the hub by a capacitor, wherein the hub and the ring are each electrically conductive, and where the hub has a central opening aligned with a central axis of the inductively coupled plasma apparatus; a top wall spaced apart from and above the bottom wall, wherein the top wall has a central opening aligned with the central axis, and wherein the top wall is electrically conductive; a sidewall electrically connecting the ring to the top wall; and a tube electrically connecting the hub to the top wall, the tube having a central opening aligned with the central axis. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the hub comprises a plurality of radially outwardly directed spokes. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the ring comprises a plurality of radially inwardly directed spokes. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the hub comprises a plurality of radially outwardly directed spokes and the ring comprises a corresponding plurality of radially inwardly directed spokes that are aligned with the plurality of radially outwardly directed spokes, and wherein the capacitor comprises a plurality of capacitors at least one each joining respective radially outwardly directed spokes to corresponding radially inwardly directed spokes. ### Claim 5 (depends on 1) The apparatus of claim 1, further comprising: a dielectric plate disposed below the bottom wall and comprising a gas distribution device axially aligned with the tube. ### Claim 6 (depends on 5) The apparatus of claim 5, further comprising: a gas conduit fluidly coupled to the gas distribution device and extending through the central openings of the tube and the top wall. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein at least one of the hub and the ring comprise a heater. ### Claim 8 (depends on 1) The apparatus of claim 1, further comprising a ferrite core encircling a portion of the tube. ### Claim 9 (depends on 1) The apparatus of claim 1, further comprising a conductive coil wound about a portion of the tube and coupled to a ground through an electrically conductive portion of the apparatus. ### Claim 10 (depends on 9) The apparatus of claim 9, wherein the conductive coil is helically wound about a toroidal path encircling the tube. ### Claim 11 (depends on 10) The apparatus of claim 10, wherein the conductive coil is electrically coupled to ground. ### Claim 12 (depends on 10) The apparatus of claim 10, wherein the conductive coil is wound about a ferrite core. ### Claim 13 (depends on 1) The apparatus of claim 1, further comprising: a primary energy input, a first end of which is electrically bonded to an electrically conductive portion of the apparatus. ### Claim 14 (depends on 13) The apparatus of claim 13, wherein the primary energy input is electrically bonded to at least one of the tube or the top wall. ### Claim 15 (depends on 13) The apparatus of claim 13, further comprising: a conductive coil wound about a portion of the tube and having a first end coupled to the ring or the sidewall, wherein the primary energy input is electrically bonded to a second end of the conductive coil opposite the first end. ### Claim 16 (depends on 13) The apparatus of claim 13, wherein a second end of the primary energy input is coupled to a power source. ### Claim 17 An inductively coupled plasma reactor, comprising: a chamber body having a processing volume; and an inductively coupled plasma apparatus supported by the chamber body to couple RF energy into the processing volume, comprising: a bottom wall comprising a hub and a ring coupled to the hub by a capacitor, wherein the hub and the ring are each electrically conductive, and where the hub has a central opening aligned with a central axis of the inductively coupled plasma apparatus; a top wall spaced apart from and above the bottom wall, wherein the top wall has a central opening aligned with the central axis, and wherein the top wall is electrically conductive; a sidewall electrically connecting the ring to the top wall; a tube electrically connecting the hub to the top wall, the tube having a central opening aligned with the central axis; a dielectric plate disposed below the bottom wall and comprising a gas distribution device axially aligned with the tube; a gas conduit fluidly coupled to the gas distribution device and extending through the central openings of the tube and the top wall; and a conductive coil wound about a portion of the tube and coupled to an electrically conductive portion of the apparatus.