# US 2014/0196545 A1 · Pressure measuring instrument and substrate processing apparatus provided with the pressure measuring instrument

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- Number: US 2014/0196545 A1
- Document ID: US20140196545A1
- Status: Published application
- Kind: A1
- Application number: 14/150,457
- Filed: 2014-01-08
- Published: 2014-07-17
- Earliest claimed: 2013-01-16
- Assignees: Tokyo Electron Limited
- Applicants: Tokyo Electron Limited
- Inventors: Satoru KOIKE
- Web page: https://patentgrep.com/patent/US20140196545A1

## CPC

- G01L 19/145: {with stress relieving means}
- G01L 9/0042: {Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms (details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively)}
- G01L 19/0636: {using particle filters}
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)

## Abstract

There is provided a pressure measuring instrument including: a detecting unit including the reference pressure chamber therein and formed in a cylindrical shape, the diaphragm being disposed inside the detecting unit; a communicating unit for providing communication between the diaphragm and the measurement pressure chamber, and formed in a circular tube shape having an inner diameter smaller than an inner diameter of the detecting unit; and an annular flow-path forming unit disposed between the detecting unit and the communicating unit, and configured to form a substantially annular path. The communicating unit introduces a gas of the measurement pressure chamber into the substantially annular path. The annular flow-path forming unit allows the gas introduced from the communicating unit to pass through the substantially annular path and to supply the passing gas to a side surface of the diaphragm.

## Claims

### Claim 1

A pressure measuring instrument that, using a diaphragm disposed between a reference pressure chamber and a measurement pressure chamber, detects a deformation of the diaphragm and consequently measures a pressure of the measurement pressure chamber, the pressure measuring instrument comprising:
a detecting unit including the reference pressure chamber therein and formed in a cylindrical shape, the diaphragm being disposed inside the detecting unit;
a communicating unit for providing communication between the diaphragm and the measurement pressure chamber, and formed in a circular tube shape having an inner diameter smaller than an inner diameter of the detecting unit; and
an annular flow-path forming unit disposed between the detecting unit and the communicating unit, and configured to form a substantially annular path,
wherein the communicating unit configured to introduce a gas of the measurement pressure chamber into the substantially annular path, the annular flow-path forming unit configured to allow the gas introduced from the communicating unit to pass through the substantially annular path and to supply the passing gas to a side surface of the diaphragm, and the substantially annular path is formed at a location opposite to a location at which a differential value of a displacement of the diaphragm reaches a peak.

### Claim 2 (depends on 1)

The instrument of claim 1, wherein a range of inner and outer diameters of the substantially annular path is a predetermined range opposite to a location at which the diaphragm is axial-symmetrically deformed by a difference in pressure between the reference pressure chamber and the measurement pressure chamber.

### Claim 3 (depends on 1)

The instrument of claim 1, wherein the annular flow-path forming unit includes a circular flat plate having an outer diameter within a range of 5% to 15% of an inner diameter of the detecting unit or an outer diameter of the diaphragm.

### Claim 4 (depends on 3)

The instrument of claim 3, wherein the outer diameter of the circular flat plate is set based on the inner diameter of the detecting unit or the outer diameter of the diaphragm so as to control at least one of a shift amount and a shift direction of the diaphragm.

### Claim 5 (depends on 1)

The instrument of claim 1, wherein the deformation of the diaphragm is detected in a capacitative, piezoelectric or optical manner.

### Claim 6 (depends on 1)

A substrate processing apparatus, comprising:
the pressure measuring instrument of claim 1; and
a substrate processing unit configured to process a substrate in a process chamber that communicates with the measurement pressure chamber.