# US 2014/0196543 A1 · Scanning Acoustic Microscope with an Inverted Transducer and Bubbler Functionality > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0196543 A1 - Document ID: US20140196543A1 - Status: Published application - Kind: A1 - Application number: 14/216,429 - Filed: 2014-03-17 - Published: 2014-07-17 - Earliest claimed: 2010-11-23 - Assignees: Sonoscan, Inc. - Applicants: Sonoscan, Inc. - Inventors: Lawrence W. Kessler; Thomas Kleinschmidt; Dan Micek - Web page: https://patentgrep.com/patent/US20140196543A1 ## CPC - G01N 29/0681: {by acoustic microscopy, e.g. scanning acoustic microscopy} - G01N 29/265: by moving the sensor relative to a stationary material - G01N 29/28: providing acoustic coupling {, e.g. water (impedance matching G10K11/02)} - G01N 2291/101: one transducer - G01N 2291/2697: Wafer or (micro)electronic parts - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract A scanning acoustic microscope includes a transducer mounted in a cup below a particular elevation capable of producing ultrasonic energy and a coupling fluid source disposed below the particular elevation, which is configured to introduce coupling fluid into the cup. Ultrasonic energy is directed upwardly through coupling fluid disposed between and contacting the transducer and a first surface of a part to be inspected. The part is disposed at the particular elevation such that a second surface of the part is not contacted by coupling fluid during testing. ## Claims ### Claim 1 A scanning acoustic microscope, comprising: a transducer mounted in a cup below a particular elevation capable of producing ultrasonic energy; and a coupling fluid source disposed below the particular elevation, which is configured to introduce coupling fluid into the cup; wherein ultrasonic energy is directed upwardly through coupling fluid disposed between and contacting the transducer and a first surface of a part to be inspected, and wherein the part is disposed at the particular elevation and wherein a second surface of the part is not contacted by coupling fluid during testing. ### Claim 2 (depends on 1) The scanning acoustic microscope of claim 1, further including an air source disposed above the particular elevation that is configured to blow air downwardly on the second surface of the part to be inspected to prevent the part from moving upwardly during testing. ### Claim 3 (depends on 2) The scanning acoustic microscope of claim 2, wherein the air source is a fan or air knife. ### Claim 4 (depends on 1) The scanning acoustic microscope of claim 1, further including a controller operable to control the transducer and the coupling fluid source during testing. ### Claim 5 (depends on 1) The scanning acoustic microscope of claim 1, further including a pump for pressurizing the coupling fluid before it enters the cup. ### Claim 6 (depends on 1) The scanning acoustic microscope of claim 1, further including a drain saucer proximate the cup for collecting coupling fluid. ### Claim 7 (depends on 1) The scanning acoustic microscope of claim 1, further including a driver for driving the transducer along a scan path. ### Claim 8 (depends on 7) The scanning acoustic microscope of claim 7, further including a display operated by the controller for displaying scan results. ### Claim 9 A scanning acoustic microscope, comprising: a transducer mounted in a cup below a particular elevation; a coupling fluid source disposed below the particular elevation, which is configured to introduce coupling fluid into the cup; a pump connected to the cup for pressurizing the coupling fluid before it enters the cup; and a controller operable to control the transducer and the coupling fluid source during testing such that ultrasonic energy is directed upwardly through coupling fluid disposed between and contacting the transducer and a first surface of a part to be tested, wherein the part is disposed at the particular elevation and wherein a second surface of the part is not contacted by coupling fluid during testing. ### Claim 10 (depends on 9) The scanning acoustic microscope of claim 9, further including an air source disposed above the particular elevation that is configured to blow air downwardly on the second surface of the part to prevent the part to be tested from moving upwardly during testing. ### Claim 11 (depends on 10) The scanning acoustic microscope of claim 10, wherein the air source is a fan or air knife. ### Claim 12 (depends on 9) The scanning acoustic microscope of claim 9, further including a drain saucer proximate the cup for collecting coupling fluid. ### Claim 13 (depends on 9) The scanning acoustic microscope of claim 9, further including a driver for driving the transducer along a scan path. ### Claim 14 (depends on 9) The scanning acoustic microscope of claim 9, in combination with a part to be tested, coupling fluid, and a tray that carries the part to be tested. ### Claim 15 A method of scanning a part using a scanning acoustic microscope comprising the steps of: mounting a transducer mounted in a cup below a particular elevation; disposing a coupling fluid source at the particular elevation, wherein the coupling fluid source is configured to introduce coupling fluid into the cup; and providing a controller for controlling the transducer and the coupling fluid source during testing such that ultrasonic energy is directed upwardly through coupling fluid disposed between and contacting the transducer and a bottom surface of the part to be inspected, wherein the part is disposed at the particular elevation and wherein an upper surface of the part is not contacted by coupling fluid during testing. ### Claim 16 (depends on 15) The method of scanning a part of claim 15, further including the step of pressurizing the coupling fluid before it enters the cup. ### Claim 17 (depends on 15) The method of scanning a part of claim 15, further including the step of blowing air down on the part during testing. ### Claim 18 (depends on 15) The method of scanning a part of claim 15, further including the step of collecting the coupling fluid in a drain saucer disposed proximate the cup. ### Claim 19 (depends on 15) The method of scanning a part of claim 15, further including the step of driving the transducer along a scan path. ### Claim 20 (depends on 19) The method of scanning a part of claim 19, further including the step of displaying results of a scan performed on the part.