# US 2014/0193325 A1 · 3-dimensional nanoparticle assembly structure and gas sensor using same

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- Number: US 2014/0193325 A1
- Document ID: US20140193325A1
- Status: Published application
- Kind: A1
- Application number: 14/155,039
- Filed: 2014-01-14
- Published: 2014-07-10
- Earliest claimed: 2012-07-13
- Assignees: Snu R&Db Foundation; Global Frontier Center for Multiscale Energy Systems
- Applicants: Global Frontier Center for Multiscale Energy Systems; SNU R&DB Foundation
- Inventors: Woongsik Nam; Yongjun Bae; Man Soo Choi
- Web page: https://patentgrep.com/patent/US20140193325A1

## CPC

- C25D 13/02: with inorganic material
- B82B 3/0047: {Bonding two or more elements}
- C01G 3/02: Oxides; Hydroxides
- C23C 14/042: {using masks}
- C23C 14/32: by explosion; by evaporation and subsequent ionisation of the vapours {, e.g. ion-plating}(C23C14/34 - C23C14/48 take precedence)
- C23C 14/5853: {Oxidation}
- C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- B82B: NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- C01G: COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F (metal hydrides {monoborane, diborane or addition complexes thereof} C01B6/00; salts of oxyacids of halogens C01B11/00; peroxides, salts or peroxyacids C01B15/00; thiosulfates, dithionites, polythionates C01B17/64; compounds containing selenium, or tellurium C01B19/00; binary compounds of nitrogen with metals C01B21/06; azides C01B21/08; {compounds containing nitrogen, other non-metals and metal C01B21/082}; metal amides C01B21/092; nitrites C01B21/50; {compounds of noble gases C01B23/0005}; phosphides C01B25/08; salts of oxyacids of phosphorus C01B25/16; carbides C01B32/90; compounds containing silicon C01B33/00; compounds containing boron C01B35/00; compounds having molecular sieve properties but not having base-exchange properties C01B37/00; compounds having molecular sieve and base-exchange properties, e.g. crystalline zeolites, C01B39/00; cyanides C01C3/08; salts of cyanamide C01C3/16; thiocyanates C01C3/20)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

The present invention provides a 3-dimensional nanoparticle structure, wherein a plurality of structures formed by assembling nanoparticles is connected to form a bridge, and a gas sensor using the same.

## Claims

### Claim 1

A gas sensor using a 3-dimensional nanoparticle structure, wherein a plurality of structures formed by assembling metal or metal oxide nanoparticles is connected to form a bridge.

### Claim 2 (depends on 1)

The 3-dimensional nanoparticle structure according to claim 1, wherein the plurality of structures formed by assembling metal or metal oxide nanoparticles has a petal shape, and the neighboring petals are connected to form a bridge.

### Claim 3 (depends on 1)

A method for manufacturing a gas sensor using the nanoparticle structure of claim 1, which comprises the steps of:
1) positioning a substrate, which has a micro or nanopattern formed by a mask layer having a perforated pattern, in a reactor, and then applying an electric field;
2) generating charged nanoparticles and ions by spark discharging metal or metal oxide nanoparticle precursors in a spark discharge chamber; and
3) introducing the charged nanoparticles and ions into the reactor, and then focused-depositing the nanoparticles at the perforated part of the micro or nano pattern of the substrate to form the nanoparticle structure.

### Claim 4 (depends on 3)

The method according to claim 3, which further comprises a step of generating ions by corona discharge, and then accumulating the ions on the micro or nano pattern of the substrate, which is located in the reactor, before conducting the step 2).

### Claim 5 (depends on 3)

The method according to claim 3, which further comprises a step of heating the nanoparticle structure under oxygen-containing atmosphere.