# US 2014/0192447 A1 · Esd protection device and method for producing the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0192447 A1 - Document ID: US20140192447A1 - Status: Published application - Kind: A1 - Application number: 14/206,339 - Filed: 2014-03-12 - Published: 2014-07-10 - Earliest claimed: 2011-09-14 - Assignees: Murata Manufacturing Co., Ltd. - Applicants: Murata Manufacturing Co., Ltd. - Inventors: Takahiro Sumi; Jun Adachi; Takayuki Tsukizawa - Web page: https://patentgrep.com/patent/US20140192447A1 ## CPC - H01B 3/08: quartz; glass; glass wool; slag wool; vitreous enamels - H01B 19/04: Treating the surfaces, e.g. applying coatings - H01T 1/20: Means for starting arc or facilitating ignition of spark gap - H01T 4/12: hermetically sealed - H01T 21/00: Apparatus or processes specially adapted for the manufacture or maintenance of spark gaps or sparking plugs - H02H 9/04: responsive to excess voltage (lightning arrestors H01C7/12, H01C8/04, H01G9/18, H01T) - H05F 3/04: by means of spark gaps or other discharge devices (devices providing for corona discharge per se H01T19/00) - H05K 1/0259: {Electrostatic discharge [ESD] protection} - H05K 9/0079: {Electrostatic discharge protection, e.g. ESD treated surface for rapid dissipation of charges} - H01B: CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES (selection for magnetic properties H01F1/00; waveguides H01P {; printed circuits H05K}) - H01T: SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES (overvoltage protection circuits H02H) - H02H: EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS (indicating or signalling undesired working conditions G01R, e.g. G01R31/00, G08B; locating faults along lines G01R31/08; emergency protective devices H01H) - H05F: STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY - H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS ## Abstract An ESD protection device having high insulation reliability and good discharge properties is provided. In producing an ESD protection device that includes a first discharge electrode and a second discharge electrode arranged to oppose each other, a discharge supporting electrode formed so as to span between the first and second discharge electrodes, and an insulator substrate that retains the first and second discharge electrodes and the discharge supporting electrode, a paste for forming a discharge supporting electrode is used and this paste contains, in addition to a powder of an alkali metal compound and/or an alkaline earth metal compound, a metal powder with a network-forming oxide adhered to particle surfaces, a metal powder and a semiconductor powder with a network-forming oxide adhered to particle surfaces, or a metal powder with a network-forming oxide adhered to particle surfaces and a semiconductor powder with a network-forming oxide adhered to particle surfaces. ## Claims ### Claim 1 An ESD protection device comprising: a first discharge electrode and a second discharge electrode arranged to oppose each other; a discharge supporting electrode formed so as to span between the first and second discharge electrodes; and an insulator substrate that retains the first and second discharge electrodes and the discharge supporting electrode, wherein the discharge supporting electrode contains a plurality of metal particles and a glass that bonds between the metal particles, and the glass contains an alkali metal component and/or an alkaline earth metal component. ### Claim 2 (depends on 1) The ESD protection device according to claim 1, wherein the discharge supporting electrode further contains a network-forming oxide adhered to surfaces of the metal particles. ### Claim 3 (depends on 1) The ESD protection device according to claim 1, wherein the discharge supporting electrode further contains silicon carbide. ### Claim 4 (depends on 1) The ESD protection device according to claim 1, wherein the metal particles comprise copper or a copper alloy containing copper as a main component. ### Claim 5 (depends on 1) The ESD protection device according to claim 1, wherein the first and second discharge electrodes and the discharge supporting electrode are positioned inside the insulator substrate, the insulator substrate has a cavity where a gap between the first and second discharge electrodes lies, and the ESD protection device further comprises a first outer terminal electrode and a second outer terminal electrode which are formed on a surface of or another surface of the insulator substrate and respectively electrically connected to the first and second discharge electrodes. ### Claim 6 A method for producing an ESD protection device, the method comprising: a step of preparing an insulator substrate; a step of preparing a discharge supporting electrode paste that contains, in addition to a powder of an alkali metal compound and/or an alkaline earth metal compound, (1) a metal powder with a network-forming oxide adhered to particle surfaces, (2) a metal powder and a semiconductor powder with a network-forming oxide adhered to particle surfaces, or (3) a metal powder with a network-forming oxide adhered to particle surfaces and a semiconductor powder with a network-forming oxide adhered to particle surfaces; a step of forming a green discharge supporting electrode formed of the discharging supporting electrode paste on a surface of or inside the insulator substrate; a step of forming a first discharge electrode and a second discharge electrode on the surface of, another surface of, or inside the insulator substrate so that the first and second discharge electrodes oppose each other on the discharge supporting electrode; and a step of firing the green discharge supporting electrode. ### Claim 7 (depends on 6) The method for producing an ESD protection device according to claim 6, wherein the semiconductor powder is a silicon carbide powder. ### Claim 8 (depends on 6) The method for producing an ESD protection device according to claim 6, wherein the alkali metal compound and the alkaline earth metal compound are carbonate. ### Claim 9 (depends on 8) The method for producing an ESD protection device according to claim 8, wherein a total content of the alkali metal carbonate and the alkaline earth metal carbonate in the discharge supporting electrode paste is 0.2% to 2.5% by weight. ### Claim 10 (depends on 6) The method for producing an ESD protection device according to claim 6, wherein the step of preparing the insulator substrate includes a step of preparing a plurality of ceramic green sheets including a first ceramic green sheet and a second ceramic green sheet, the step of forming the green discharge supporting electrode and the step of forming the first discharge electrode and the second discharge electrode are performed on the first ceramic green sheet, the method further comprises: a step of forming a combustibly removable layer so as to cover a gap between the first and second discharge electrodes; a step of obtaining the insulator substrate in a green state by stacking the second ceramic green sheet on the first ceramic green sheet so as to cover the green discharge supporting electrode, the first and second discharge electrodes, and the combustibly removable layer; and a step of forming a first outer terminal electrode and a second outer terminal electrode, which are respectively electrically connected to the first and second discharge electrodes, on the surface of or another surface of the insulator substrate, and the firing step includes a step of obtaining the insulator substrate by sintering the ceramic green sheets and a step of combustibly removing the combustibly removable layer. ### Claim 11 (depends on 2) The ESD protection device according to claim 2, wherein the discharge supporting electrode further contains silicon carbide. ### Claim 12 (depends on 2) The ESD protection device according to claim 2, wherein the metal particles comprise copper or a copper alloy containing copper as a main component. ### Claim 13 (depends on 3) The ESD protection device according to claim 3, wherein the metal particles comprise copper or a copper alloy containing copper as a main component. ### Claim 14 (depends on 2) The ESD protection device according to claim 2, wherein the first and second discharge electrodes and the discharge supporting electrode are positioned inside the insulator substrate, the insulator substrate has a cavity where a gap between the first and second discharge electrodes lies, and the ESD protection device further comprises a first outer terminal electrode and a second outer terminal electrode which are formed on a surface of or another surface of the insulator substrate and respectively electrically connected to the first and second discharge electrodes. ### Claim 15 (depends on 3) The ESD protection device according to claim 3, wherein the first and second discharge electrodes and the discharge supporting electrode are positioned inside the insulator substrate, the insulator substrate has a cavity where a gap between the first and second discharge electrodes lies, and the ESD protection device further comprises a first outer terminal electrode and a second outer terminal electrode which are formed on a surface of or another surface of the insulator substrate and respectively electrically connected to the first and second discharge electrodes. ### Claim 16 (depends on 4) The ESD protection device according to claim 4, wherein the first and second discharge electrodes and the discharge supporting electrode are positioned inside the insulator substrate, the insulator substrate has a cavity where a gap between the first and second discharge electrodes lies, and the ESD protection device further comprises a first outer terminal electrode and a second outer terminal electrode which are formed on a surface of or another surface of the insulator substrate and respectively electrically connected to the first and second discharge electrodes. ### Claim 17 (depends on 7) The method for producing an ESD protection device according to claim 7, wherein the alkali metal compound and the alkaline earth metal compound are carbonate. ### Claim 18 (depends on 7) The method for producing an ESD protection device according to claim 7, wherein the step of preparing the insulator substrate includes a step of preparing a plurality of ceramic green sheets including a first ceramic green sheet and a second ceramic green sheet, the step of forming the green discharge supporting electrode and the step of forming the first discharge electrode and the second discharge electrode are performed on the first ceramic green sheet, the method further comprises: a step of forming a combustibly removable layer so as to cover a gap between the first and second discharge electrodes; a step of obtaining the insulator substrate in a green state by stacking the second ceramic green sheet on the first ceramic green sheet so as to cover the green discharge supporting electrode, the first and second discharge electrodes, and the combustibly removable layer; and a step of forming a first outer terminal electrode and a second outer terminal electrode, which are respectively electrically connected to the first and second discharge electrodes, on the surface of or another surface of the insulator substrate, and the firing step includes a step of obtaining the insulator substrate by sintering the ceramic green sheets and a step of combustibly removing the combustibly removable layer. ### Claim 19 (depends on 8) The method for producing an ESD protection device according to claim 8, wherein the step of preparing the insulator substrate includes a step of preparing a plurality of ceramic green sheets including a first ceramic green sheet and a second ceramic green sheet, the step of forming the green discharge supporting electrode and the step of forming the first discharge electrode and the second discharge electrode are performed on the first ceramic green sheet, the method further comprises: a step of forming a combustibly removable layer so as to cover a gap between the first and second discharge electrodes; a step of obtaining the insulator substrate in a green state by stacking the second ceramic green sheet on the first ceramic green sheet so as to cover the green discharge supporting electrode, the first and second discharge electrodes, and the combustibly removable layer; and a step of forming a first outer terminal electrode and a second outer terminal electrode, which are respectively electrically connected to the first and second discharge electrodes, on the surface of or another surface of the insulator substrate, and the firing step includes a step of obtaining the insulator substrate by sintering the ceramic green sheets and a step of combustibly removing the combustibly removable layer. ### Claim 20 (depends on 9) The method for producing an ESD protection device according to claim 9, wherein the step of preparing the insulator substrate includes a step of preparing a plurality of ceramic green sheets including a first ceramic green sheet and a second ceramic green sheet, the step of forming the green discharge supporting electrode and the step of forming the first discharge electrode and the second discharge electrode are performed on the first ceramic green sheet, the method further comprises: a step of forming a combustibly removable layer so as to cover a gap between the first and second discharge electrodes; a step of obtaining the insulator substrate in a green state by stacking the second ceramic green sheet on the first ceramic green sheet so as to cover the green discharge supporting electrode, the first and second discharge electrodes, and the combustibly removable layer; and a step of forming a first outer terminal electrode and a second outer terminal electrode, which are respectively electrically connected to the first and second discharge electrodes, on the surface of or another surface of the insulator substrate, and the firing step includes a step of obtaining the insulator substrate by sintering the ceramic green sheets and a step of combustibly removing the combustibly removable layer.