# US 2014/0192412 A1 · Package, optical module, and electronic apparatus

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- Number: US 2014/0192412 A1
- Document ID: US20140192412A1
- Status: Published application
- Kind: A1
- Application number: 14/148,925
- Filed: 2014-01-07
- Published: 2014-07-10
- Earliest claimed: 2013-01-07
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Hideo Imai
- Web page: https://patentgrep.com/patent/US20140192412A1

## CPC

- G02B 5/284: {of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates (etalons for fibre optic multiplexing G02B6/29358; etalons for spectral measurement G01J3/26)}
- G01J 3/26: using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
- G02B 26/001: {based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26)}
- G02B 27/0006: {with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B)}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

A base substrate, a lid that forms an internal space capable of housing a device (variable-wavelength interference filter), and a brazing filler that joins the lid to the base substrate are provided. The lid has: a lid joining portion having a base facing surface that faces the base substrate, an inner lateral surface that continues at an inner end on the side of the internal space of the base facing surface and faces the internal space, an outer lateral surface, and an upper surface; and a lid sidewall portion standing up in a direction away from the base substrate from the upper surface of the lid joining portion. The brazing filler is provided along the base facing surface and the outer lateral surface from the inner end to the upper end of the outer lateral surface via an outer end opposite to the inner end.

## Claims

### Claim 1

A package comprising:
a base substrate;
a lid that forms an internal space capable of housing a device between the base substrate and the lid; and
a brazing filler that joins the lid to the base substrate;
wherein the lid has: a lid joining portion having a base facing surface that faces the base substrate, an inner lateral surface that continues at an inner end on the side of the internal space of the base facing surface and faces the internal space, an outer lateral surface that continues at an outer end opposite to the inner end of the base facing surface, and an upper surface that continues at an upper end opposite to the outer end of the outer lateral surface; and a lid sidewall portion standing up in a direction away from the base substrate from the upper surface of the lid joining portion, and the brazing filler is provided along the base facing surface and the outer lateral surface from the inner end to the upper end via the outer end.

### Claim 2 (depends on 1)

The package according to claim 1, wherein an area of a region facing the device on the base substrate is equal to or greater than 90% of an area of a region on the inner side from a position facing the inner end on the base substrate, as viewed in a plan view seen from a direction of thickness of the base substrate.

### Claim 3 (depends on 1)

The package according to claim 1, wherein the inner lateral surface has lower wettability to the brazing filler than the base facing surface.

### Claim 4 (depends on 1)

The package according to claim 1, wherein a metal pattern having higher wettability to the brazing filler than the base substrate is provided on the base substrate, and
the metal pattern is provided on the outer side from a position facing the inner end, as viewed in a plan view seen from a direction of thickness of the base substrate.

### Claim 5 (depends on 1)

The package according to claim 1, wherein an angle formed by the outer lateral surface and the upper surface is an acute angle.

### Claim 6 (depends on 1)

The package according to claim 1, wherein an angle formed by the base facing surface and the outer lateral surface is an obtuse angle.

### Claim 7 (depends on 1)

The package according to claim 1, wherein the device is an interference filter having a first substrate, a second substrate facing the first substrate, a first reflection film that is provided on the first substrate, reflects a part of incident light and transmits a part of the incident light, and a second reflection film that is provided on the second substrate, faces the first reflection film, reflects a part of incident light and transmits a part of the incident light.

### Claim 8

An optical module comprising:
an interference filter having a first substrate, a second substrate facing the first substrate, a first reflection film that is provided on the first substrate, reflects a part of incident light and transmits a part of the incident light, and a second reflection film that is provided on the second substrate, faces the first reflection film, reflects a part of incident light and transmits a part of the incident light;
a detection unit that detects light taken out by the first reflection film and the second reflection film;
a base substrate;
a lid that is joined to the base substrate and forms an internal space capable of housing the interference filter between the base substrate and the lid; and
a brazing filler that joins the lid to the base substrate;
wherein the lid has: a lid joining portion having a base facing surface that faces the base substrate, an inner lateral surface that continues at an inner end on the side of the internal space of the base facing surface and faces the internal space, an outer lateral surface that continues at an outer end opposite to the inner end of the base facing surface, and an upper surface that continues at an upper end opposite to the outer end of the outer lateral surface; and a lid sidewall portion standing up in a direction away from the base substrate from the upper surface of the lid joining portion, and
the brazing filler is provided along the base facing surface and the outer lateral surface from the inner end to the upper end via the outer end.

### Claim 9

An electronic apparatus comprising:
an interference filter having a first substrate, a second substrate facing the first substrate, a first reflection film that is provided on the first substrate, reflects a part of incident light and transmits a part of the incident light, and a second reflection film that is provided on the second substrate, faces the first reflection film, reflects a part of incident light and transmits a part of the incident light;
a control unit that controls the interference filter;
a base substrate;
a lid that is joined to the base substrate and forms an internal space capable of housing the interference filter between the base substrate and the lid; and
a brazing filler that joins the lid to the base substrate;
wherein the lid has: a lid joining portion having a base facing surface that faces the base substrate, an inner lateral surface that continues at an inner end on the side of the internal space of the base facing surface and faces the internal space, an outer lateral surface that continues at an outer end opposite to the inner end of the base facing surface, and an upper surface that continues at an upper end opposite to the outer end of the outer lateral surface; and a lid sidewall portion standing up in a direction away from the base substrate from the upper surface of the lid joining portion, and
the brazing filler is provided along the base facing surface and the outer lateral surface from the inner end to the upper end via the outer end.
