# US 2014/0192399 A1 · Asymmetrical deformable diffractive grating modulator

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- Number: US 2014/0192399 A1
- Document ID: US20140192399A1
- Status: Published application
- Kind: A1
- Application number: 13/737,983
- Filed: 2013-01-10
- Published: 2014-07-10
- Earliest claimed: 2013-01-10
- Assignees: Eastman Kodak Company
- Inventors: Nissim Pilossof
- Web page: https://patentgrep.com/patent/US20140192399A1

## CPC

- G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)}
- G02B 26/0841: {the reflecting element being moved or deformed by electrostatic means}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A system for modulating light using a micro-electro-mechanical structure includes a plurality of deformable mirror elements (30) having an L-shaped cross section. Each of the deformable mirror elements are comprised of a pedestal (32) and an elongated ribbon (33). Each of the ribbons has a reflective surface (35). A beam of light is directed on the deformable mirror elements. The deformable mirror elements is flexed about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons.

## Claims

### Claim 1

A system for modulating light using a micro-electro-mechanical structure comprising:
a plurality of deformable mirror elements having an L-shaped cross section;
wherein each of said deformable mirror elements is comprised of a pedestal and an elongated ribbon;
a reflective surface on each of said ribbons;
a light source; and
wherein said deformable mirror elements flex about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons and deflect a beam of light from said light source.

### Claim 2 (depends on 1)

The system of claim 1 wherein said reflective surface has one or more reflective segments.

### Claim 3 (depends on 1)

The system of claim 1 wherein each of said deformable mirror elements flexes independently.

### Claim 4 (depends on 1)

The system of claim 1 wherein each of the pedestals is anchored to a substrate parallel to each adjacent pedestal.

### Claim 5 (depends on 1)

The system of claim 1 further comprising:
an activation device on each of said ribbons.

### Claim 6 (depends on 5)

The system of claim 5 wherein said activation device to induces curvature in a pixel group of said ribbons.

### Claim 7 (depends on 5)

The system of claim 5 further comprising:
a complimentary activation devices on a substrate that anchors the pedestal on each of said deformable mirror elements; and
wherein said complimentary activation device induces curvature in said ribbons.

### Claim 8 (depends on 5)

The system of claim 5 wherein said activation device is selected from a group comprising electrical, magnetic, or heating elements.

### Claim 9 (depends on 1)

The system of claim 1 wherein the reflective surface is conductive.

### Claim 10 (depends on 1)

The system of claim 1 wherein said reflective surface is matched to a wavelength of the light.

### Claim 11 (depends on 1)

The system of claim 1 wherein the reflective surface is aluminum and a wavelength of the light is in the visible range.

### Claim 12 (depends on 1)

The system of claim 1 wherein the reflective surface is gold and a wavelength of the light is in the infrared range.