# US 2014/0191650 A1 · Electric field emitting source, element using same, and production method therefor

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- Number: US 2014/0191650 A1
- Document ID: US20140191650A1
- Status: Published application
- Kind: A1
- Application number: 14/152,045
- Filed: 2014-01-10
- Published: 2014-07-10
- Earliest claimed: 2011-07-11
- Assignees: Korea University Research and Business Foundation
- Applicants: Korea University Research and Business Foundation
- Inventors: Cheol Jin Lee; Dong Hoon Shin; Ji Hong Shin
- Web page: https://patentgrep.com/patent/US20140191650A1

## CPC

- H01J 19/24: Cold cathodes, e.g. field-emissive cathode
- H01J 1/304: Field-emissive cathodes
- H01J 3/021: {Electron guns using a field emission, photo emission, or secondary emission electron source}
- H01J 9/025: {of field emission cathodes}
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

An electric field emitting source is equipped with an electron emitting film which comprises a nano-sized electron emitting substance and has a first surface and a second surface constituting the surface opposite thereto, and a cathode which secures one end of the electron emitting film and comprises a first block and a second block respectively corresponding to the first surface and the second surface of the electron emitting film.

## Claims

### Claim 1

A field emission source comprising:
an electron emission film containing nano-sized electron emission materials and having a first surface and a second surface opposite to the first surface; and
a cathode comprising a first block corresponding to the first surface and a second block corresponding to the second surface to fix one end of the electron emission film.

### Claim 2 (depends on 1)

The field emission source of claim 1,
wherein the cathode is provided on both ends of the field emission film.

### Claim 3 (depends on 1)

The field emission source of claim 1,
wherein at least one of the first and second blocks is formed of one of an insulating material and a metallic material.

### Claim 4 (depends on 1)

The field emission source of claim 1,
wherein the electron emission materials of the electron emission film are combined to one another through a molecular force without requiring a binder.

### Claim 5 (depends on 1)

The field emission source of claim 1,
wherein the field emission source further comprises a base that supports the first block, and
the first surface of the field emission film is positioned in parallel with a surface of the base.

### Claim 6 (depends on 2)

The field emission source of claim 2,
wherein at least one of the first and second blocks is formed of one of an insulating material and a metallic material.

### Claim 7 (depends on 2)

The field emission source of claim 2,
wherein the electron emission materials of the electron emission film are combined to one another through a molecular force without requiring a binder.

### Claim 8 (depends on 2)

The field emission source of claim 2,
wherein the field emission source further comprises a base that supports the first block, and
the first surface of the field emission film is positioned in parallel with the surface of the base.

### Claim 9

A field emission device comprising:
an electron emission film containing nano-sized electron emission materials and having a first surface and a second surface opposite to the first surface;
a cathode comprising a first block and a second block corresponding to the first surface and the second surface of the electron emission film, respectively, to fix one end of the electron emission film;
a substrate that supports the cathode; and
an anode formed on the other side of the substrate, facing to the electron emission film.

### Claim 10 (depends on 9)

The field emission device of claim 9,
further comprising a gate provided between the cathode and the anode, and
wherein an end of the electron emission film is positioned facing to one side surface of the anode.

### Claim 11 (depends on 10)

The field emission device of claim 10,
wherein the gate comprises gate members provided at both sides of an electron passageway between the electron emission film and the anode.

### Claim 12 (depends on 10)

The field emission device of claim 10,
wherein the gate comprises a surface positioned at a lower portion of the electron passageway between the electron emission film and the anode.

### Claim 13 (depends on 10)

The field emission device of claim 10,
wherein the cathode is provided on both ends of the field emission film.

### Claim 14 (depends on 10)

The field emission device of claim 10,
wherein the electron emission materials of the electron emission film are combined to one another through a molecular force without requiring a binder.

### Claim 15 (depends on 11)

The field emission device of claim 11,
wherein the electron emission materials of the electron emission film are combined to one another through a molecular force without requiring a binder.

### Claim 16 (depends on 12)

The field emission device of claim 12,
wherein the electron emission materials of the electron emission film are combined to one another through a molecular force without requiring a binder.

### Claim 17 (depends on 13)

The field emission device of claim 13,
wherein the electron emission materials of the electron emission film are combined to one another through a molecular force without requiring a binder.

### Claim 18

A method for fabricating a field emission device, the method comprising:
forming a first block, which is an element of a cathode, on one side of a substrate;
forming a sacrificial layer having a surface with the same height as that of the first block on a part, in which the first block is not formed;
forming an electron emission film by using electron emission materials on a surface of the first block and a surface of the sacrificial layer;
forming a second block corresponding to the first block on the electron emission film; and
removing the sacrificial layer so that the electron emission film has a gap from the substrate, and fixing an end of the electron emission film in the state that it is inserted between the first and second blocks.

### Claim 19 (depends on 18)

The method for fabricating a field emission device as claimed in claim 18,
wherein the forming the first block forms a first anode together on a position spaced from the first block,
the forming the sacrificial layer forms sacrificial layer on an area between the first block and the first anode, and
the forming the electron emission film forms the electron emission film on a top surface of the first block, the first anode and the sacrificial layer.

### Claim 20 (depends on 19)

The method for fabricating a field emission device as claimed in claim 19,
wherein the method further comprises:
after the step of forming the second block and before the step of removing the sacrificial layer,
separating the electron emission film from the first anode layer by processing the electron emission film; and
forming a second anode layer having a height corresponding to the second block on the first anode.
