# US 2014/0191431 A1 · Pressure-Sensitive Adhesive Sheet for Immobilization of Imprint Mold, Imprint Apparatus, and Imprint Method

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- Number: US 2014/0191431 A1
- Document ID: US20140191431A1
- Status: Published application
- Kind: A1
- Application number: 14/241,466
- Filed: 2012-08-27
- Published: 2014-07-10
- Earliest claimed: 2011-08-31
- Assignees: Soken Chemical & Engineering Co., Ltd.
- Inventors: Satoshi Uehara; Takanori Takahashi
- Web page: https://patentgrep.com/patent/US20140191431A1

## CPC

- B29C 59/002: {Component parts, details or accessories; Auxiliary operations}
- C09J 7/20: characterised by their carriers
- C09J 7/22: Plastics; Metallised plastics
- C09J 7/38: Pressure-sensitive adhesives [PSA]
- G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping}
- B29C 59/02: by mechanical means, e.g. pressing {(B29C59/007 takes precedence; embossing expanded porous articles B29C44/5627)}
- B29C 59/04: using rollers or endless belts
- B29C 2059/023: {Microembossing}
- C09J 2301/1242: the opposite adhesive layers being different
- C09J 2433/00: Presence of (meth)acrylic polymer
- Y10T 428/24942: including components having same physical characteristic in differing degree
- B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00)
- C09J: ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES (preparation of glue or gelatine C09H)
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A pressure-sensitive adhesive sheet used for integrally immobilizing an imprint mold to a pressure application unit in an imprint apparatus for transferring a profile of a fine pattern formed on the imprint mold to a transfer-receiving body by pressing the imprint mold having the fine pattern thereon against the transfer-receiving body, having a substrate, a pressure-sensitive adhesive layer (A) provided on one surface of the substrate and a pressure-sensitive adhesive layer (B) provided on the other surface of the substrate. The adhesive strength of the pressure-sensitive adhesive layer (B) at 23° C. is higher than the adhesive strength of the pressure-sensitive adhesive layer (A) at 23° C., the pressure-sensitive adhesive layer (A) has an adhesive strength of 1 to 10 N/25 mm at 23° C. and an adhesive strength of 1 to 30 N/25 mm after allowed to stand for 7 hours at 80° C. and a humidity of 65%, and the pressure-sensitive adhesive layer (B) has an adhesive strength of 3 to 30 N/25 mm at 23° C.

## Claims

### Claim 1

A pressure-sensitive adhesive sheet for immobilization of an imprint mold, which is a pressure-sensitive adhesive sheet used for integrally immobilizing an imprint mold to a pressure application unit in an imprint apparatus for transferring a profile of a fine pattern formed on the imprint mold to a transfer-receiving body by pressing the imprint mold having the fine pattern thereon against the transfer-receiving body,
said pressure-sensitive adhesive sheet having a substrate, a pressure-sensitive adhesive layer (A) provided on one surface of the substrate and a pressure-sensitive adhesive layer (B) provided on the other surface of the substrate,
wherein the pressure-sensitive adhesive layer (A) is used for being bonded to the pressure application unit of the imprint apparatus, and the pressure-sensitive adhesive layer (B) is used for being bonded to the imprint mold,
the adhesive strength of the pressure-sensitive adhesive layer (B) at 23° C. is higher than the adhesive strength of the pressure-sensitive adhesive layer (A) at 23° C., and
the pressure-sensitive adhesive layer (A) has an adhesive strength of 1 to 10 N/25 mm at 23° C. and an adhesive strength of 1 to 30 N/25 mm after allowed to stand for 7 hours at 80° C. and a humidity of 65%, and the pressure-sensitive adhesive layer (B) has an adhesive strength of 3 to 30 N/25 mm at 23° C.

### Claim 2 (depends on 1)

The pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1, which is used in an imprint apparatus wherein the pressure applied to the imprint mold during imprinting is 0.1 to 50 MPa.

### Claim 3 (depends on 1)

The pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1, which is used in a roll type imprint apparatus.

### Claim 4 (depends on 1)

The pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1, which is used for integrally immobilizing an imprint mold having a pattern of a size of nanometer order formed thereon to the pressure application unit.

### Claim 5 (depends on 1)

The pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1, wherein the pressure-sensitive adhesive layer (B) contains a light absorber and/or a light stabilizer.

### Claim 6 (depends on 1)

The pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1, wherein the adhesive strength of a pressure-sensitive adhesive in the pressure-sensitive adhesive layer (A) is 1 to 10 N/25 mm.

### Claim 7 (depends on 6)

The pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 6, wherein the pressure-sensitive adhesive in the pressure-sensitive adhesive layer (A) is an acrylic copolymer obtained by copolymerizing a (meth)acrylic monomer and a monomer having a crosslinking functional group.

### Claim 8 (depends on 1)

The pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1, wherein the weight-average molecular weight of a polymer to constitute the pressure-sensitive adhesive in the pressure-sensitive adhesive layer (A) is 800,000 to 1,800,000.

### Claim 9 (depends on 1)

The pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1, wherein the pressure-sensitive adhesive in the pressure-sensitive adhesive layer (A) is an acrylic/silicone-based copolymer obtained by copolymerizing monomers containing 0.5 to 20 parts by weight of a silicone-containing monomer based on 100 parts by weight of all the monomers.

### Claim 10 (depends on 1)

The pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1, wherein the gel fraction of the pressure-sensitive adhesive layer (A) is 70 to 95%.

### Claim 11 (depends on 1)

The pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1, wherein the pressure-sensitive adhesive layer (A) contains 1 to 20 parts by weight of silicone oil based on 100 parts by weight of the pressure-sensitive adhesive.

### Claim 12 (depends on 1)

An imprint apparatus for transferring a profile of a fine pattern formed on an imprint mold to a transfer-receiving body by pressing the imprint mold having the fine pattern thereon against the transfer-receiving body, wherein:
when the imprint mold which comes into direct contact with the transfer-receiving body is integrally immobilized to a pressure application unit, on which a pressure is applied, with the pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1, the pressure-sensitive adhesive layer (B) is positioned on the imprint mold side of the substrate of the pressure-sensitive adhesive sheet, and the pressure-sensitive adhesive layer (A) is positioned on the pressure application unit side of the substrate thereof.

### Claim 13 (depends on 12)

The imprint apparatus as claimed in claim 12, wherein the pressure application unit is a roll type pressure application unit.

### Claim 14 (depends on 1)

A method for immobilizing an imprint mold to an imprint apparatus, comprising bonding the pressure-sensitive adhesive layer (A) of the pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1 to a pressure application unit and bonding an imprint mold to the pressure-sensitive adhesive layer (B) of the pressure-sensitive adhesive sheet for immobilization of an imprint mold.

### Claim 15 (depends on 1)

A method for removing an imprint mold from an imprint apparatus, comprising peeling off the pressure-sensitive adhesive layer (A) of the pressure-sensitive adhesive sheet for immobilization of an imprint mold as claimed in claim 1 from a pressure application unit.