# US 2014/0191416 A1 · Semiconductor device

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- Number: US 2014/0191416 A1
- Document ID: US20140191416A1
- Status: Published application
- Kind: A1
- Application number: 14/202,555
- Filed: 2014-03-10
- Published: 2014-07-10
- Earliest claimed: 2011-08-03
- Assignees: Elpida Memory, Inc.
- Applicants: Elpida Memory, Inc.
- Inventors: Tomohiro KITANO; Hisayuki NAGAMINE
- Web page: https://patentgrep.com/patent/US20140191416A1

## CPC

- H10W 20/42: Vias, e.g. via plugs
- H10D 89/10: Integrated device layouts
- H10W 20/423: {Shielding layers}
- H10W 20/43: Layouts of interconnections
- H10W 20/496: {Capacitor integral with wiring layers}
- H10W 90/00: Package configurations
- H10B 12/50: {Peripheral circuit region structures}
- H10W 20/20: Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
- H10W 70/635: {Through-vias}
- H10W 74/012: {of encapsulations on active surfaces of flip-chip devices, e.g. forming underfills}
- H10W 74/117: {the substrate having spherical bumps for external connection}
- H10W 74/15: on active surfaces of flip-chip devices, e.g. underfills
- H10W 90/26: the stacked chips being of the same size without any chips being laterally offset, e.g. chip stacks having a rectangular shape
- H10W 90/297: {characterised by the through-semiconductor vias [TSVs] in the stacked chips}
- H10W 90/701: {characterised by the relative positions of pads or connectors relative to package parts}
- H10W 90/722: {between stacked chips}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10B: ELECTRONIC MEMORY DEVICES

## Abstract

A semiconductor device comprises a first external terminal having a first size, a plurality of second external terminals each having a second size smaller than the first size, an external terminal area in which the first external terminal and the second external terminals are arranged, and a plurality of wires connecting between the second external terminals and a plurality of circuits formed adjacent to the external terminal area and corresponding to the second external terminals. The second external terminals and the wires constitute a plurality of interfaces. Each of the interfaces includes at least one adjustment portion that adjusts a time constant of the wire so that the wires have the same time constant. At least part of the adjustment portions is located in a margin area produced in the external terminal area by a difference between the first size and the second size.

## Claims

### Claim 1

A semiconductor device comprising:
a semiconductor substrate;
a plurality of through silicon vias formed through the semiconductor substrate and spaced at first predetermined intervals in a first direction;
a plurality of power supply connection pads each having a first size, and the power supply connection pads being connected to first selected ones of the through silicon vias;
a plurality of input/output connection pads each having a second size, smaller than the first size, and the input/output connection pads being connected to second selected ones of the through silicon vias other than the first selected ones of the through silicon vias;
a plurality of input/output circuits; and
a plurality of wires connecting the input/output circuits to respective ones of the input/output connection pads, and
wherein the wires include adjustment portions to provide distance compensation between the input/output circuits and respective input/output connection pads.

### Claim 2 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the power supply connection pads comprise VDD and VSS power supply connection pads.

### Claim 3 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the power supply connection pads comprise VDDQ and VSSQ power supply connection pads.

### Claim 4 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the power supply connection pads comprise VDD, VSS, VDDQ and VSSQ power supply connection pads.

### Claim 5 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the input/output connection pads comprise address/command connection pads.

### Claim 6 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the input/output connection pads comprise DQ connection pads.

### Claim 7 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the semiconductor device is a DRAM chip.

### Claim 8 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the semiconductor device is a controller chip.

### Claim 9 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the semiconductor device is a DRAM.

### Claim 10 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the through silicon vias are spaced at second predetermined intervals in a second direction orthogonal to the first direction.

### Claim 11 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the second predetermined interval is greater than the first predetermined interval.

### Claim 12 (depends on 11)

The semiconductor device as claimed in claim 11 wherein the wires are located within the space defined by the second predetermined interval.

### Claim 13 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the adjustment portions are each located in an area defined by the difference between the first size and the second size.

### Claim 14 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the wires each have equal length and width, and the adjustment portions each comprise surplus portions of wire not required to span the distance between each input/output circuit and respective input/output connection pad.

### Claim 15 (depends on 14)

The semiconductor device as claimed in claim 14 wherein the surplus portion of wire is bent in a meandering manner.

### Claim 16 (depends on 14)

The semiconductor device as claimed in claim 14 wherein the surplus portion of wire is formed into a swirl around a respective input/output connection pad.

### Claim 17 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the adjustment portions each comprise a capacitor.

### Claim 18 (depends on 17)

The semiconductor device as claimed in claim 17 wherein the capacitor comprises a comb-shaped capacitor.

### Claim 19 (depends on 17)

The semiconductor device as claimed in claim 17 wherein the adjustment portions each comprise a parallel plate structure.

### Claim 20 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the wires each have substantially the same resistance.

### Claim 21 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the wires each have substantially the same capacitance.

### Claim 22 (depends on 1)

The semiconductor device as claimed in claim 1 wherein the wires each have substantially the same time constant.
