# US 2014/0191234 A1 · Three Dimensional Stacked Structure for Chips

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- Number: US 2014/0191234 A1
- Document ID: US20140191234A1
- Status: Published application
- Kind: A1
- Application number: 14/147,293
- Filed: 2014-01-03
- Published: 2014-07-10
- Earliest claimed: 2013-01-04
- Inventors: Tsai-Yu Huang; Yi-Feng Huang
- Web page: https://patentgrep.com/patent/US20140191234A1

## CPC

- H10W 20/42: Vias, e.g. via plugs
- H10P 74/273: {Interconnections for measuring or testing, e.g. probe pads}
- H10W 90/00: Package configurations
- H10W 20/20: Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
- H10W 72/01: {Manufacture or treatment}
- H10W 90/284: {characterised by structural arrangements for measuring or testing}
- H10W 90/297: {characterised by the through-semiconductor vias [TSVs] in the stacked chips}
- H10W 90/722: {between stacked chips}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A 3-D chip stacked structure is disclosed. Each chip layer is provided with plural single-layered conductive members where among the same chip layer the two adjacent conductive members are structurally formed in minor symmetric way with each other along a chip longitudinal direction and the arrangements of the single-layered conductive members of the two adjacent chip layers are shifted by a test pad distance. The single-layered conductive members of the two adjacent chip layers are communicated through a vertical TSV (through silicon via). Therefore, a selection signal or an enabling signal might be transferred through this specific metal layer and related TSV to reach targeting chip layer and targeting circuit.

## Claims

### Claim 1

A three dimensional chips stacked structure, comprising plural chips layers, each of said plural chips layers having plural single-layered conductive members formed thereon, each of said plural single-layered conductive members having a test pad formed thereon, wherein two adjacent said single-layered conductive members for said each of said plural chips layers are structurally formed in minor symmetry with each other along a chip longitudinal direction and an arrangement of said plural single-layered conductive members of two adjacent chip layers are shifted by a predetermined distance, and said plural single-layered conductive members of said two adjacent chip layers communicated through a vertical TSV.

### Claim 2 (depends on 1)

The structure of claim 1, wherein said each of said plural single-layered conductive members includes a pad branch and a non-pad branch, wherein said test pad is configured on said pad branch.

### Claim 3 (depends on 2)

The structure of claim 2, wherein for said two adjacent chip layers, at least one said single-layered conductive members of top chip layer extends from said non-pad branch vertically downward to corresponding single-layered conductive member of underlying chip layer by said TSV.

### Claim 4 (depends on 2)

The structure of claim 2, wherein between said pad branch and said non-pad branch has an included angle.

### Claim 5 (depends on 1)

The structure of claim 1, wherein said plural single-layered conductive members is L-shaped.

### Claim 6 (depends on 1)

The structure of claim 1, wherein a material of said plural single-layered conductive members is copper.

### Claim 7 (depends on 1)

The structure of claim 1, wherein said each of plural single-layered conductive members is connected to a corresponding distinct circuit.

### Claim 8 (depends on 7)

The structure of claim 7, wherein said corresponding distinct circuit of any one of said plural chips layers is applied to a relatively high voltage, others corresponding distinct circuit of said plural chips layers is applied to a relatively low voltage.

### Claim 9 (depends on 1)

The structure of claim 1, wherein said corresponding distinct circuit includes an input terminal connected to a drain electrode of a first N-type metal oxide semiconductor field effect transistors (NMOS), a output terminal connected to a lock control circuit, a gate electrode of said first NMOS connected to a reset signal source, a source electrode of said first NMOS connected to ground.

### Claim 10 (depends on 9)

The structure of claim 9, wherein said lock control circuit includes a first inverter, a second converter, a second NMOS and a third NMOS.

### Claim 11 (depends on 10)

The structure of claim 10, wherein said output terminal is connected to an input terminal of said first inverter and a source electrode of said second NMOS, and an output terminal of said first inverter is connected to an input terminal of said second inverter and a gate electrode of said second NMOS.

### Claim 12 (depends on 11)

The structure of claim 11, wherein an output terminal of said second inverter is connected to a gate electrode of said third NMOS, a drain electrode of said second NMOS is connected to a source electrode of said third NMOS, and a drain electrode of said third NMOS is connected to ground.

### Claim 13 (depends on 12)

The structure of claim 12, wherein a connecting wire is used to connect to said source electrode of said third NMOS for all lock control circuits.

### Claim 14 (depends on 1)

The structure of claim 1, wherein one of said single-layered conductive members on far left side for each chip layer is connected to a select circuit.

### Claim 15 (depends on 1)

The structure of claim 1, wherein one of said single-layered conductive members on far right side for each chip layer is connected to a select circuit.

### Claim 16 (depends on 1)

The structure of claim 1, wherein said test pad is square aluminum pad.
