# US 2014/0191195 A1 · Focal plane array with pixels defined by modulation of surface fermi energy

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- Number: US 2014/0191195 A1
- Document ID: US20140191195A1
- Status: Published application
- Kind: A1
- Application number: 14/147,716
- Filed: 2014-01-06
- Published: 2014-07-10
- Earliest claimed: 2013-01-04
- Inventors: Mani Sundaram; Axel Reisinger
- Web page: https://patentgrep.com/patent/US20140191195A1

## CPC

- H10F 39/807: {Pixel isolation structures}
- H10F 30/222: the potential barrier being a PN heterojunction
- H10F 77/146: {Superlattices; Multiple quantum well structures}
- H10F 77/206: {for devices having potential barriers}
- H10F 39/011: {Manufacture or treatment of image sensors covered by group H10F39/12}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

Pixels in a focal plane array are defined by controlled variation of the Fermi energy at the surface of the detector array. Varying the chemical composition of the semiconductor at the detector surface produces a corresponding variation in the surface Fermi energy which produces a corresponding variation in the electric field and electrostatic potential in the bulk semiconductor below the surface. This defines pixels by having one Fermi energy at the surface of each pixel and a different Fermi energy at the surface between pixels. Fermi energy modulation can also be controlled by applying an electrostatic potential voltage V1 to the metal pad defining each pixel, and applying a different electrostatic potential voltage V2 to an interconnected metal grid covering the gaps between all the pixel metal pads. Methods obviate the need to etch deep trenches between pixels, resulting in a more manufacturable quasi-planar process without sacrificing performance.

## Claims

### Claim 1

A semiconductor planar structure device comprising at least one region defined by controlled variation of Fermi energy at a surface comprising:
at least one pixel comprising a pixel pad having a perimeter;
a gap surrounding said perimeter of said pixel pad;
a detector layer beneath said at least one pixel pad and said gap,
wherein said pixels are defined by having a first Fermi energy at a surface of each said pixel pad and a second Fermi energy at a surface at said gap between said pixels,
whereby variation between said first Fermi energy and said second Fermi energy produces a corresponding lateral variation in electric field and electrostatic potential in said detector layer below said surface of said pixel pad and said surface at said gap.

### Claim 2 (depends on 1)

The device of claim 1, wherein said device is a high operating temperature midwave infrared focal plane array with a half maximum cutoff wavelength of about 5.1 microns.

### Claim 3 (depends on 1)

The device of claim 1, wherein said detector layer comprises a bulk semiconductor whose energy bandgap, and therefore cutoff wavelength, is determined by material composition of said bulk semiconductor, with a cutoff wavelength between about 400 nanometers and about 1 millimeter.

### Claim 4 (depends on 1)

The device of claim 1, wherein said detector layer comprises a superlattice whose energy bandgap, and therefore cutoff wavelength, is determined by materials and period of said superlattice, with a cutoff wavelength between about 400 nanometers and about 1 millimeter.

### Claim 5 (depends on 1)

The device of claim 1, further comprising a readout multiplexer to generate video imagery.

### Claim 6 (depends on 1)

The device of claim 1, comprising a Type II superlattice wherein high contrast images are produced by said detector device when used in an imaging system.

### Claim 7 (depends on 1)

The device of claim 1, wherein said Fermi energy variation is controlled by applying an electrostatic potential voltage V1 to a metal pad defining each said at least one pixel and applying a different electrostatic potential voltage V2 to an interconnected metal grid within said gaps between said metal pads defining each said at least one pixel.

### Claim 8 (depends on 1)

The device of claim 1, wherein said detector layer comprises sequentially deposited semiconductor planar layers forming either a p-n junction or an n-p junction configured to generate a photocurrent when illuminated by light radiation;
a planar semiconductor first cap layer above said detector, said first cap layer comprising a first semiconductor material;
a planar semiconductor second cap layer above said first cap layer, said second cap layer comprising a second semiconductor material, said gap being defined by selectively removing said second cap layer in region between pixels,
wherein said first semiconductor material and said second semiconductor material are dissimilar;
said first semiconductor material and said second semiconductor material having different surface state characteristics such that a Fermi level at a surface of said first cap layer is pinned at a first Fermi energy level and a Fermi level at a surface of said second cap layer is pinned at a second Fermi energy level, and
wherein said first Fermi energy level is not equal to said second Fermi energy level.

### Claim 9 (depends on 8)

The device of claim 8, wherein an optically active part of said detector comprises one or more barriers,
wherein said one or more barriers curtail a magnitude of generation-recombination currents within junction regions,
whereby performance does not degrade at higher temperature operations compared to p-n or n-p junction photodiodes that exclude said one or more barriers.

### Claim 10 (depends on 8)

The device of claim 8, wherein contact to each said at least one pixel is through a metal contact pad deposited on top of each of said second cap layer pixel pads.

### Claim 11 (depends on 8)

The device of claim 8, wherein surface leakage currents are eliminated because edges of said p-n or n-p junctions are buried in an interior of said semiconductor structure, not exposed to a semiconductor surface.

### Claim 12 (depends on 8)

The device of claim 8, wherein, optical fill factor is 100%.

### Claim 13 (depends on 8)

The device of claim 8, wherein lateral conductivity of said first cap layer in said gaps between said pixels is reduced so that inter-pixel crosstalk is about zero.

### Claim 14 (depends on 8)

The device of claim 8, wherein thickness of said first cap layer is about 200 Angströms, and thickness of said second cap layer is about 200 Angströms.

### Claim 15 (depends on 8)

The device of claim 8, wherein depth of said gap between said pixels is about 200 Angströms.

### Claim 16 (depends on 8)

The device of claim 8, wherein said second cap layer is etched away producing said pixel pads, so as to leave only said first cap layer in a two dimensional array of semiconductor islands in such a way that transfer of surface charge carriers leads to one carrier density in interior of said islands and another, different, carrier density in interior of regions between said islands, resulting in a two dimensional modulation of carrier concentration.

### Claim 17 (depends on 16)

The device of claim 16, wherein said etching of said second cap layer exclusively defines a two dimensional array of individual pixels, excluding etching deep trenches for p-n or n-p junctions.

### Claim 18

A method for fabricating a focal plane array (FPA) comprising:
providing a substrate;
providing a common contact layer on said substrate;
providing an absorber layer on said common contact layer;
providing a barrier layer on said absorber layer;
providing a cap one layer on said barrier layer;
providing a cap two layer on said cap one layer;
selectively etching said cap two layer to delineate pixels of said FPA;
providing a metal contact layer on said defined cap two layer; and
providing a metal common contact layer to said common contact layer.

### Claim 19 (depends on 18)

The method of claim 18, wherein said barrier layer comprises aluminum arsenide antimonide (AlAsSb).

### Claim 20 (depends on 18)

The method of claim 18, wherein said absorber layer comprises a Type II superlattice.

### Claim 21 (depends on 18)

The method of claim 18, wherein said cap one layer comprises gallium antimonide (GaSb), and said cap two layer comprises indium arsenide (InAs).

### Claim 22

A high operating temperature midwave infrared focal plane array detector system comprising:
a substrate layer comprising gallium antimonide (GaSb);
a common conducting layer on said substrate;
an absorber layer comprising a Type II superlattice;
a barrier layer on said absorber layer, thickness of said barrier layer being between about 0.1 micron and about 0.5 micron, doping of said barrier layer being less than about 1e16 cm−3;
a first cap layer comprising gallium antimonide (GaSb), thickness of said first cap layer being about 200 Angströms;
a second cap layer comprising indium arsenide (InAs), said second cap layer etched to form gaps between pixels of said detector, thickness of said second cap layer being about 200 Angströms, depth of said gaps being about 200 Angströms;
at least one metal contact pixel pad, photolithographically formed on top of each said pixel,
wherein surface Fermi energy amplitude is about 250 meV,
wherein optical fill-factor is about 100%,
wherein spectrally averaged quantum efficiency is about 85% over a temperature range from about 80K to about 150K,
wherein a noise-equivalent temperature difference does not exceed about 30 millikelvin up to an operating temperature of about 130 K with F/4 optics, and
half maximum cutoff wavelength of about 5.1 microns.

### Claim 23 (depends on 22)

The device of claim 22, wherein each pixel of said detector array is electrically connected to a corresponding unit cell on a matching readout multiplexer array to form a hybrid focal plane array.

### Claim 24 (depends on 23)

The device of claim 23, wherein electrical connections comprise metallic bumps using a metal selected from the group consisting of indium, gold, tin, and a gold-tin alloy.