# US 2014/0191125 A1 · Sample Block Holder

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- Number: US 2014/0191125 A1
- Document ID: US20140191125A1
- Status: Published application
- Kind: A1
- Application number: 14/147,884
- Filed: 2014-01-06
- Published: 2014-07-10
- Earliest claimed: 2011-10-28
- Assignees: FEI Company
- Applicants: FEI Company
- Inventors: Matthew Barrett; Michael D. Smith; Michal Geryk; Paul Scagnetti; Richard Tovey
- Web page: https://patentgrep.com/patent/US20140191125A1

## CPC

- H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
- H01J 37/16: Vessels; Containers
- G01N 2223/307: cuvettes-sample holders
- G01N 2223/418: electron microscope
- G01N 2223/616: earth materials
- H01J 2237/2007: Holding mechanisms
- H01J 2237/201: for mounting multiple objects
- H01J 2237/28: Scanning microscopes
- H01J 2237/2826: Calibration
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.

## Claims

### Claim 1

A sample holder system for a charged particle beam system having a sample chamber with a sample stage, comprising:
a stage mount for being affixed to the stage of a charged particle beam system, the stage mount including three alignment structures;
a base plate including three alignment structures, each alignment structure on the base plate structured to mate with a corresponding alignment structure on the stage mount, one of each mating alignment structures on the base plate or on stage mount including a hemispherical portion;
a sample tray configured to be removably attachable onto the base plate, the sample tray having multiple holes for positioning sample blocks;
a clamp holding the sample tray to the base plate; and
a calibration standard holder secured to the stage mount and remaining on the stage mount as samples are changed in the charged particle beam system.

### Claim 2 (depends on 1)

The sample holder system of claim 1 in which the alignment structures that mate with the three hemispherical portions comprise conical indentations.

### Claim 3 (depends on 1)

The sample holder system of claim 1 in which the alignment structures that mates with the three alignment structures on the stage mount comprise hemispherical portions and in which the three alignment structures on the base plate comprise conical or hemispherical indentations.

### Claim 4 (depends on 1)

The sample holder system of claim 1 in which the combined sample tray and base plate holder with sample blocks is maintained on the sample stage during charged particle beam operation by the weight of the sample holder, without additional restraint.

### Claim 5 (depends on 1)

The sample holder system of claim 1 in which the three mating structures on the stage mount are attached to the stage mount using fasteners.

### Claim 6

(canceled)

### Claim 7

(canceled)

### Claim 8

A method for using a sample holder system for a scanning electron microscope for mineralogical sample comprising:
placing sample blocks into a sample tray, the sample tray having holes for positioning the sample blocks;
placing a base plate behind the sample blocks to maintain the sample blocks in the sample tray, the base plate including three alignment structures;
fastening the base plate to the sample tray without tools;
placing the assembled sample tray, base plate, and sample blocks onto a stage mount of the scanning electron microscope, the stage mount including alignment structures to mate with the alignment structures on the base plate, the alignment structures on the base plate mating with the alignment structures on the stage mount mating to position and orient the sample blocks in on the stage of the charged particle beam system; and
operating the charge particle beam system to analyze the sample in the sample blocks, the assembled sample tray, base plate, and sample blocks resting on the stage mount without being fastened to the stage mount.

### Claim 9 (depends on 8)

The method of claim 8 further comprising measuring a calibration standard attached to the stage mount, the calibration standard remaining attached to the stage mount when the sample tray, base plate, and sample blocks are removed.

### Claim 10 (depends on 8)

The method of claim 8 in which placing the assembled sample tray, base plate, and sample blocks onto a stage mount in the scanning electron microscope includes placing a base plate having conical or hemispherical indentations onto a stage mount having hemispherical mating structures.

### Claim 11 (depends on 8)

The method of claim 8 in which placing a base plate behind the sample blocks to maintain the sample blocks in the sample tray includes providing a spring to press at least one of the sample blocks into position at the sample tray holes.

### Claim 12 (depends on 8)

The method of claim 8 in which operating the charge particle beam system includes directing the electron beam to a sample block in an assembly including the sample block, sample tray, and base plate, the assembly supported on the stage mount by the weight of the assembly, without additional restraints.

### Claim 13 (depends on 8)

The method of claim 8 in which placing the assembled sample tray, base plate, and sample blocks onto a stage mount includes providing at least one spring to provide electrical contact between the stage mount and the base plate.

### Claim 14

A sample holder system for a charged particle beam system having a sample chamber with a sample stage, comprising:
a stage mount for being affixed to the stage of a charged particle beam system, the stage mount including three alignment structures;
a base plate including three alignment structures, each alignment structure on the base plate structured to mate with a corresponding alignment structure on the stage mount;
a sample tray configured to be removably attachable onto the base plate, the sample tray having multiple sample blocks positions; and
a calibration standard holder secured to the stage mount and remaining on the stage mount as samples are changed in the charged particle beam system.

### Claim 15 (depends on 14)

The sample holder system of claim 14 in which the alignment structures or the corresponding alignment structures include three hemispherical portions or conical indentations.

### Claim 16 (depends on 14)

The sample holder system of claim 14 in which the alignment structures that mates with the three alignment structures on the stage mount comprise hemispherical portions and in which the three alignment structures on the base plate comprise conical or hemispherical indentations.

### Claim 17 (depends on 14)

The sample holder system of claim 14 in which the combined sample tray and base plate holder with sample blocks is maintained on the sample stage during charged particle beam operation by the weight of the sample holder, without additional restraint.

### Claim 18 (depends on 14)

The sample holder system of claim 14 in which the three mating structures on the stage mount are attached to the stage mount using fasteners.

### Claim 19

(canceled)

### Claim 20

(canceled)
