# US 2014/0191111 A1 · Accumulating optical detector with shutter emulation

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- Number: US 2014/0191111 A1
- Document ID: US20140191111A1
- Status: Published application
- Kind: A1
- Application number: 14/097,117
- Filed: 2013-12-04
- Published: 2014-07-10
- Earliest claimed: 2012-12-10
- Assignees: DCG Systems, Inc.
- Applicants: DCG Systems, Inc.
- Inventors: Herve Deslandes
- Web page: https://patentgrep.com/patent/US20140191111A1

## CPC

- H10F 39/8037: {the integrated elements comprising a transistor}
- G01J 3/14: using refracting elements, e.g. prisms (G01J3/18, G01J3/26 take precedence {prisms per se G02B5/04})
- G01J 3/2803: {using photoelectric array detector}
- G01R 31/311: of integrated circuits {(G01R31/31728 takes precedence)}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

An optical detector is disclosed, having a plurality of detector cells, each detector cell comprising a light sensor, a charge accumulator, and a switch interposed between the light sensor and the charge accumulator; wherein the light sensor produces electrical current when illuminated by electromagnetic radiation, the charge accumulator accumulate electric charge when receiving the electrical current generated by the light sensor, and the switch is configured to controllably electrically isolate or connect the charge accumulator to light sensor, such that the charge accumulator accumulates charge only when electrically connected by the switch to the light sensor.

## Claims

### Claim 1

An optical detector, comprising:
a plurality of detector cells, each detector cell comprising a light sensor, a charge accumulator, and a switch interposed between the light sensor and the charge accumulator;
wherein the light sensor produces electrical current when illuminated by electromagnetic radiation, the charge accumulator accumulate electric charge when receiving the electrical current generated by the light sensor, and the switch is configured to controllably electrically isolate or connect the charge accumulator to light sensor, such that the charge accumulator accumulates charge only when electrically connected by the switch to the light sensor.

### Claim 2 (depends on 1)

The optical detector of claim 1, wherein said light sensor is a MOS device.

### Claim 3 (depends on 1)

The optical detector of claim 1, wherein said light sensor is a InGaAs device.

### Claim 4 (depends on 1)

The optical detector of claim 1, wherein said light sensor is an HgCdTe device.

### Claim 5 (depends on 1)

The optical detector of claim 1, wherein said light sensor is sensitive to electromagnetic spectrum at wavelengths between 1 um and 3 um.

### Claim 6 (depends on 1)

The optical detector of claim 1, wherein said light sensor is sensitive to electromagnetic spectrum at infrared wavelengths.

### Claim 7 (depends on 1)

The optical detector of claim 1, further comprising a controller coupled to the switch and providing an on/off signals to control the switch.

### Claim 8

A system for testing samples, comprising:
an excitation source applying a series of excitations pulses to the sample;
an optical sensor situated to image a desired area of the sample;
a controller providing clock signal to the excitation source and a sync signal to the optical sensor;
wherein the optical sensor comprises:
an array of light sensors, an array of charge accumulators, and a switching circuit interposed between the array of light sensors and the array of charge accumulators;
wherein the array of light sensors produces electrical current when illuminated by electromagnetic radiation, the array of charge accumulators accumulates electric charge when receiving the electrical current generated by the array of light sensors, and the switching circuit electrically isolates or connects the array of charge accumulators to the array of light sensors according to the sync signal.

### Claim 9 (depends on 8)

The system of claim 8, wherein the sample is a VLSI device under test and the excitation signal comprises electrical test vector.

### Claim 10 (depends on 8)

The system of claim 8, wherein the excitation signal comprises heat pulses.

### Claim 11 (depends on 8)

The system of claim 8, wherein the excitation signal comprises light pulses.

### Claim 12 (depends on 8)

The system of claim 8, wherein the excitation signal comprises electrical pulses.

### Claim 13 (depends on 8)

The system of claim 8, wherein the sensor comprises on of MOS, InGaAs, or HgCdTe array.

### Claim 14 (depends on 8)

The system of claim 8, wherein the switching circuit comprises an array of capacitors, wherein each capacitor of the array of capacitors is coupled between one respective light sensor and one respective charge accumulator.

### Claim 15 (depends on 8)

The system of claim 8, wherein the switching circuit comprises an array of capacitors, wherein each capacitor of the array of capacitors is coupled between one respective sub-array of light sensors and one respective sub-array of charge accumulators.

### Claim 16 (depends on 8)

The system of claim 8, further comprising a signal acquisition board receiving output signal from the charge accumulators.

### Claim 17

A method for examining a sample, comprising:
applying a series of excitations pulses to the sample;
operating a light sensor array to image a selected area of the sample;
energizing a switching array so as to connect the light sensor array to a capacitor array during selected time windows at time periods between the series of excitation pulses; and,
using charge from the capacitor array to generate images of the sample.

### Claim 18 (depends on 17)

The method of claim 17, wherein the charge from the capacitor array is used to generate a single image corresponding to each excitation pulse.

### Claim 19 (depends on 17)

The method of claim 17, wherein the charge from the capacitor array is used to generate a series of images after each excitation pulse.

### Claim 20 (depends on 17)

The method of claim 17, further comprising obtaining a clock signal and using the clock signal synchronize the series of excitation pulses and energizing the switching array.
