# US 2014/0190936 A1 · Etching apparatus for substrate and method of etching using the same

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- Number: US 2014/0190936 A1
- Document ID: US20140190936A1
- Status: Published application
- Kind: A1
- Application number: 13/908,087
- Filed: 2013-06-03
- Published: 2014-07-10
- Earliest claimed: 2013-01-08
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co. Ltd.
- Inventors: Hae-Young YOO; Pyoung-Kyu PARK; Woo-Youl PARK; Min-Kyu SHIN; Jung-Kun SHIN
- Web page: https://patentgrep.com/patent/US20140190936A1

## CPC

- H10P 72/0424: {using mainly spraying means, e.g. nozzles}
- H10P 72/0426: {with the semiconductor substrates being dipped in baths or vessels}
- H10P 72/0414: {using mainly spraying means, e.g. nozzles}
- H10P 72/0422: {for wet etching}
- H10P 72/12: {Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements}
- H10P 72/13: {Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements}
- H10P 72/14: {Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls}
- H10P 72/15: {Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls}
- H10P 72/3406: {involving removal of lid, door or cover}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

An etching apparatus includes a receiving container which receives a substrate, and a first spraying unit which supplies etchant into the receiving container. The receiving container includes a bottom plate, a plurality of bottom through holes defined in the bottom plate and through which the etchant is drained from the receiving container; and a plurality of side walls extended from the bottom plate.

## Claims

### Claim 1

An etching apparatus comprising:
a receiving container which receives a substrate and comprises:
a bottom plate, and a plurality of bottom through holes defined in the bottom plate and through which an etchant is drained from the receiving container; and
a plurality of side walls extended from the bottom plate; and
a first spraying unit which supplies the etchant into the receiving container.

### Claim 2 (depends on 1)

The etching apparatus of claim 1, further comprising an opening and closing driving part configured to open and close the bottom through holes defined in the bottom plate.

### Claim 3 (depends on 2)

The etching apparatus of claim 2, wherein the first spraying unit comprises:
a supply pipe which is provided over the bottom plate of the receiving container and supplies the etchant; and
a plurality of spraying nozzles respectively connected to the supply pipe and facing the bottom plate of the receiving container.

### Claim 4 (depends on 2)

The etching apparatus of claim 2, wherein the opening and closing driving part comprises a plurality of protruding portions configured to be inserted into the bottom through holes defined in in the bottom plate.

### Claim 5 (depends on 4)

The etching apparatus of claim 4, wherein the opening and closing driving part moves up and down with respect to the bottom plate of the receiving container.

### Claim 6 (depends on 5)

The etching apparatus of claim 5, further comprising:
a settling tank under the receiving container and in which an impurity in the etchant drained from the receiving container is settled;
a filter part which is connected with the settling tank and filters the etchant drained from the settling tank; and
a storage tank which is connected with the filter part, stores etchant drained from the filter part and supplies etchant stored in the storage tank to the first spraying unit.

### Claim 7 (depends on 1)

The etching apparatus of claim 1, further comprising:
a plurality of side through holes defined in a lower portion of a side wall of the receiving container and through which the etchant is supplied to the receiving container; and
a side supply part which is configured to be connected to the side through holes and supplies the etchant through the side through holes to the receiving container.

### Claim 8 (depends on 7)

The etching apparatus of claim 7, wherein the side supply part comprises:
a body part facing the side wall;
a plurality of injection portions extending from the body part and configured to be inserted into the side through holes, respectively; and
a second spraying unit which supplies the etchant to the body part.

### Claim 9 (depends on 8)

The etching apparatus of claim 8, further comprising an opening and closing driving part configured to open and close the bottom through holes defined in the bottom plate.

### Claim 10 (depends on 9)

The etching apparatus of claim 9, wherein the opening and closing driving part moves up and down with respect to the bottom plate of the receiving container.

### Claim 11 (depends on 10)

The etching apparatus of claim 10, further comprising;
a settling tank under the receiving container and in which an impurity in the etchant drained from the receiving container is settled;
a filter part which is connected with the settling tank and filters the etchant drained from the settling tank; and
a storage tank which is connected with the filter part, stores the etchant drained from the filter part and supplies the etchant stored in the storage tank to the first spraying unit.

### Claim 12 (depends on 1)

The etching apparatus of claim 1, further comprising:
a plurality of side through holes defined in a lower portion of a side wall of the receiving container and through which the etchant is supplied to the receiving container; and
a second spraying unit which is configured to be connected to the side through holes and sprays the etchant through the side through holes to the receiving container.

### Claim 13 (depends on 12)

The etching apparatus of claim 12, wherein the second spraying unit comprises:
a supply pipe which is adjacent to the side
wall and supplies the etchant; and
a plurality of spraying nozzles connected to the supply pipe and configured to engage with the side through holes.

### Claim 14 (depends on 13)

The etching apparatus of claim 13, further comprising an opening and closing driving part comprising a plurality of protruding portions configured to be inserted into the plurality of bottom through holes defined in the bottom plate.

### Claim 15 (depends on 14)

The etching apparatus of claim 14, wherein the opening and closing driving part moves up and down with respect to the bottom plate of the receiving container.

### Claim 16 (depends on 15)

The etching apparatus of claim 15, further comprising:
a settling tank under the receiving container and in which an impurity in the etchant drained from the receiving container is settled;
a filter part which is connected with the settling tank and filters the etchant drained from the settling tank; and
a storage tank which is connected with the filter part, stores the etchant drained from the filter part and supplies the etchant stored in the storage tank to the first and the second spraying unit.

### Claim 17

An etching apparatus comprising:
a receiving container which receives a substrate and comprises:
a bottom plate, and a plurality of bottom through holes defined in the bottom plate and through which an etchant is drained from the receiving container; and
a plurality of side walls extended from the bottom plate;
a first inside wall inside the side walls, and a plurality of side through holes defined in a lower portion of the first inside wall and through which the etchant is supplied to the receiving container;
a second inside wall inside the side walls and facing the first inside wall, and the plurality of side through holes defined in a lower portion of the second inside wall and through which the etchant is supplied to the receiving container;
a first spraying unit which supplies the etchant into the receiving container; and
a second spraying unit which is adjacent to the first spraying unit, faces a side wall of the receiving container and supplies the etchant into the receiving container.

### Claim 18 (depends on 17)

The etching apparatus claim 17, further comprising an opening and closing driving part comprising a plurality of protruding portions configured to be inserted into the plurality of bottom through holes defined in the bottom plate,
wherein the opening and closing driving part moves up and down with respect to the bottom plate of the receiving container.

### Claim 19 (depends on 18)

The etching apparatus of claim 18, further comprising:
a settling tank under the receiving container and in which an impurity in the etchant drained from the receiving container is settled;
a filter part which is connected with the settling tank and filters the etchant drained from the settling tank; and
a storage tank which is connected with the filter part, stores the etchant drained from the filter part and supplies the etchant stored in the storage tank to the first and the second spraying unit.

### Claim 20

A method of etching a substrate using an etching apparatus, the method comprising:
moving an opening and closing driving part of the etching apparatus upward to close bottom through holes defined in a bottom plate of a receiving container of the etching apparatus and through which an etchant is drained from the receiving container;
supplying the etchant to the receiving container in a closed state of the bottom through holes to fill the receiving container with the etchant at a predetermined level;
moving the opening and closing driving part downward to open the bottom through holes defined in the bottom plate and drain the etchant from the receiving container;
supplying the etchant to the receiving container in an open state of the bottom through holes to maintain a level of the etchant at a constant level in the receiving container; and
stopping the supplying the etchant to the receiving container and the draining the etchant from the receiving container,
wherein the etching apparatus comprises:
the receiving container comprising the bottom plate, the bottom through holes defined in the bottom plate, and a plurality of side walls; and
the opening and closing driving part comprising a plurality of protruding portions configured to be inserted into the bottom through holes defined in the bottom plate.