# US 2014/0190824 A1 · Nanogap transducers with selective surface immobilization sites > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0190824 A1 - Document ID: US20140190824A1 - Status: Published application - Kind: A1 - Application number: 13/977,405 - Filed: 2011-12-28 - Published: 2014-07-10 - Earliest claimed: 2011-12-28 - Assignees: Intel Corporation - Inventors: Grace M. Credo; Oguz H. Elibol - Web page: https://patentgrep.com/patent/US20140190824A1 ## CPC - G01N 27/308: {at least partially made of carbon} - B82Y 15/00: Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors - G01N 27/26: by investigating electrochemical variables; by using electrolysis or electrophoresis - G01N 27/3277: {being a redox reaction, e.g. detection by cyclic voltammetry (voltammetry per se G01N27/42, G01N27/48)} - G01N 27/3278: {involving nanosized elements, e.g. nanogaps or nanoparticles (nanopores G01N33/48721; magnetic beads G01N27/745)} - G01N 33/48721: {Investigating individual macromolecules, e.g. by translocation through nanopores (Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68)} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract Embodiments of the invention provide transducers capable of functioning as electronic sensors and redox cycling sensors. Transducers comprise two electrodes separated by a nanogap. Molecular binding regions proximate to and within the nanogap are provided. Methods of fabricating nanogap transducers and arrays of nanogap transducers are also provided. Arrays of individually addressable nanogap transducers can be disposed on integrated circuit chips and operably coupled to the integrated circuit chip. ## Claims ### Claim 1 A device comprising, a substrate having a surface, and a transducer disposed on the substrate surface, wherein the transducer comprises: a first electrode and a second electrode wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm, a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode, an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity, a layer of preferentially functionalizable dielectric material disposed on the second electrode wherein the preferentially functionalizable dielectric layer has an exposed surface within the access hole, and a layer of dielectric material that is not preferentially functionalizable disposed on the layer of preferentially functionalizable dielectric material. ### Claim 2 (depends on 1) The device of claim 1 wherein the face of the first electrode is separated from the face of the second electrode by a distance that is between 10 and 200 nm. ### Claim 3 (depends on 1) The device of claim 1 wherein the exposed surface of the preferentially functionalizable dielectric layer comprises a surface-attached silane or sulfur-containing molecule. ### Claim 4 (depends on 1) The device of claim 1 wherein the first or the second electrode is comprised of conducting diamond. ### Claim 5 (depends on 1) The device of claim 1 wherein both the first and second electrodes are comprised of conducting diamond. ### Claim 6 (depends on 1) The device of claim 1 wherein the first electrode is comprised of nanocrystalline conducting diamond. ### Claim 7 (depends on 1) The device of claim 1 wherein the first and the second electrode are comprised of a material selected from the group consisting of conducting diamond, gold, and platinum. ### Claim 8 (depends on 1) The device of claim 1 wherein the substrate is an integrated circuit chip and the first electrode and the second electrode are independently electrically coupled to electronics within the integrated circuit chip through the conducting lines. ### Claim 9 A device comprising, a substrate having a surface, and a transducer disposed on the substrate surface, wherein the transducer comprises: a first electrode and a second electrode wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm, a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode, an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity, and a preferentially functionalizable dielectric region disposed on a region of the face of the first electrode wherein the preferentially functionalizable dielectric region comprises an exposed surface. ### Claim 10 (depends on 9) The device of claim 9 the face of the first electrode is separated from the face of the second electrode by a distance that is between 10 and 200 nm. ### Claim 11 (depends on 9) The device of claim 9 wherein the preferentially functionalizable dielectric region has an exposed surface area of 40 nm2 to 500,000 nm2. ### Claim 12 (depends on 9) The device of claim 9 wherein the exposed surface of the preferentially functionalizable dielectric region comprises a surface-attached silane or sulfur-containing molecule. ### Claim 13 (depends on 9) The device of claim 9 wherein the first or the second electrode is comprised of conducting diamond. ### Claim 14 (depends on 9) The device of claim 9 wherein the first electrode is comprised of nanocryastalline conducting diamond. ### Claim 15 (depends on 9) The device of claim 9 wherein both the first and second electrodes are comprised of conducting diamond. ### Claim 16 (depends on 9) The device of claim 9 wherein the first and the second electrode are comprised of a material selected from the group consisting of conducting diamond, gold, and platinum. ### Claim 17 A device comprising, a substrate having a surface, and a transducer disposed on the substrate surface, wherein the transducer comprises: a first electrode and a second electrode wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm, a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode, an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity, and a preferentially functionalizable region in the first electrode wherein the first electrode is disposed on the substrate surface, wherein the first electrode comprises a hole, wherein the preferentially functionalizable region comprises a region of the substrate surface that is exposed through the hole in the first electrode. ### Claim 18 (depends on 17) The device of claim 17 the face of the first electrode is separated from the face of the second electrode by a distance that is between 10 and 200 nm. ### Claim 19 (depends on 17) The device of claim 17 wherein the preferentially functionalizable region has an exposed surface area of 40 nm2 to 500,000 nm2. ### Claim 20 (depends on 17) The device of claim 17 wherein the preferentially functionalizable dielectric region comprises a surface-attached silane or sulfur-containing molecule. ### Claim 21 (depends on 17) The device of claim 17 wherein the first or the second electrode is comprised of conducting diamond. ### Claim 22 (depends on 17) The device of claim 17 wherein the first electrode is comprised of nanocryastalline conducting diamond. ### Claim 23 (depends on 17) The device of claim 17 wherein both the first and second electrodes are comprised of conducting diamond. ### Claim 24 (depends on 17) The device of claim 17 wherein the first and the second electrode are comprised of a material selected from the group consisting of conducting diamond, gold, and platinum. ### Claim 25 A system comprising, a computer operably coupled to a integrated circuit chip wherein the integrated circuit chip comprises an array of transducers disposed on a surface of the integrated circuit chip, a fluidic system capable of supplying fluids to the surface of the integrated circuit chip comprising the array of transducers, wherein transducers that make up the array are electrically coupled to and individually addressable through electronics in the integrated circuit chip, and wherein a transducer comprises: a first electrode and a second electrode wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second-electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm, a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode, an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity, and a preferentially functionalizable dielectric region disposed on a region of the face of the first electrode wherein the preferentially functionalizable dielectric region comprises an exposed surface. ### Claim 26 (depends on 25) The device of claim 25 the face of the first electrode is separated from the face of the second electrode by a distance that is between 10 and 200 nm. ### Claim 27 (depends on 25) The device of claim 25 wherein the preferentially functionalizable dielectric region has an exposed surface area of 40 nm2 to 500,000 nm2. ### Claim 28 (depends on 25) The device of claim 25 wherein the exposed surface of the preferentially functionalizable dielectric region comprises a surface-attached silane or sulfur-containing molecule. ### Claim 29 (depends on 25) The device of claim 25 wherein the first or the second electrode is comprised of conducting diamond. ### Claim 30 (depends on 25) The device of claim 25 wherein the first electrode is comprised of nanocryastalline conducting diamond. ### Claim 31 (depends on 25) The device of claim 25 wherein both the first and second electrodes are comprised of conducting diamond. ### Claim 32 (depends on 25) The device of claim 25 wherein the first and the second electrode are comprised of a material selected from the group consisting of conducting diamond, gold, and platinum. ### Claim 33 (depends on 25) The device of claim 25 wherein the array comprises at least 1000 transducers and at least 90% of the transducers are functional transducers. ### Claim 34 (depends on 25) The device of claim 25 wherein the computer is configured to perform data analysis using current measurements from one of the first or the second electrode wherein the one of the first or second electrode from which the current is measured is comprised of conducting diamond.