# US 2014/0190819 A1 · Method for supplying sequential power impulses

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2014/0190819 A1
- Document ID: US20140190819A1
- Status: Published application
- Kind: A1
- Application number: 14/112,757
- Filed: 2012-04-04
- Published: 2014-07-10
- Earliest claimed: 2011-04-20
- Assignees: Oerlikon Trading AG, Trubbach
- Inventors: Siegfried Krassnitzer; Daniel Lendi; Markus Lechthaler; Kurt Ruhm
- Web page: https://patentgrep.com/patent/US20140190819A1

## CPC

- C23C 14/3485: {using pulsed power to the target}
- C23C 14/3407: {Cathode assembly for sputtering apparatus, e.g. Target}
- C23C 14/3492: {Variation of parameters during sputtering}
- C23C 14/352: {using more than one target (C23C14/56 takes precedence)}
- H01J 37/3467: {Pulsed operation, e.g. HIPIMS}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

The invention relates to a method for supplying power impulses for PVD sputtering cathodes subdivided into partial cathodes. In said method, the power impulse intervals acting on the partial cathodes are selected in such a way as to overlap, thereby dispensing with the need to interrupt the drawing of power supplied by the generator.

## Claims

### Claim 1

Method for supplying power impulses with a scalable power impulse interval for operating a PVD sputtering cathode, with the PVD sputtering cathode comprising a first partial cathode and a second partial cathode, wherein for the partial cathodes a maximum average power feed is prescribed and the duration of the power impulse intervals is prescribed, and the method comprising the following steps:
a) providing a generator with a predefined power output, preferably a power output that is constant at least after switching on and after expiration of a power development interval,
b) switching on the generator,
c) connecting the first partial cathode to the generator so that the first partial cathode is fed with, power from the generator,
d) separating the generator from the first partial cathode after expiration of a predefined first, power impulse interval corresponding to the first, partial cathode,
e) connecting the second partial cathode to the generator so that the second partial cathode is fed with power from the generator,
f) separating the generator from the second partial cathode after expiration of a predefined second power impulse interval corresponding to the second partial cathode,
wherein the first, power impulse interval starts time-wise before the second power impulse interval and the first power impulse interval ends time-wise before the second power impulse interval,
characterized in that the steps d) and e) are executed in such a manner that the first power impulse interval and the second power impulse interval overlap in time and all power impulse intervals form together a first group, so that the power output from the generator remains sustained without interruption from the beginning of the first power impulse interval until the end of the second power impulse interval and a second power development interval does not occur.

### Claim 2 (depends on 1)

Method according to claim 1, characterized in that the overlapping in time of the first power impulse interval and of the second power impulse interval does not constitute more than x% of the power impulse intervals resp. in the case the first power impulse interval differs from the second power impulse Interval in terms of its duration, not more than x% of the power impulse interval of the shorter duration, wherein x is smaller than or equal to 20, preferably x is smaller or equal to 10.

### Claim 3 (depends on 1)

Method according to claim 1, characterized in that the PVD sputtering cathode comprises a further partial cathode, preferably several further partial cathodes, wherein the further partial cathode is connected according to steps e) and f) to the generator and is separated from it, wherein the power impulse interval assigned to the further partial cathode that is next in the sequence overlaps in time with the power impulse interval corresponding to the partial cathode that was immediately before it in the sequence, and wherein the first, second and the further power impulse interval or intervals together form the first group that is not interrupted time-wise, so that the power output from the generator remains sustained during the group interval formed by the first group continuously without interruption and a second power development interval does not occur.

### Claim 4 (depends on 1)

Method according to claim 1, characterized in that to the first group a second group is appended, within which the first, second and possibly the further partial cathode or cathodes corresponding to the first group are fed with power impulses within mutually overlapping power impulse intervals, wherein the second group is appended in such a manner to the first group that the first power impulse interval of the second group overlaps with the last power impulse interval of the first group, so that the power output from the generator from the beginning of the first power interval of the first group until the end of the last power interval of the second group remains continuous without interruption and a second power development interval does not occur.

### Claim 5 (depends on 4)

Method according to claim 4, characterized in that according to the conditions formulated in claim 4 for groups 1 and 2, N groups are attached to one another, wherein N is an integer >1.

### Claim 6 (depends on 5)

Method according to claim 5, characterized in that the number N of the groups is preferably chosen only so large that for each partial cathode n, it is true that the sum of the power impulse intervals tpn assigned to it minus respectively an overlap tdn over all groups 1 to N a maximum time of 100 ms is not exceeded.

### Claim 7 (depends on 1)

Method according to claim 1, characterized in that during a loss interval, the power delivered by the generator is supplied to a load not used for the coating, wherein the loss interval includes at least the power development interval and the loss interval overlaps with the first power impulse interval of the first group and the loss interval forms together with the groups an uninterrupted sequence.

### Claim 8 (depends on 1)

Method according claim 1, characterized in that the method according to one of the claims is repeated multiple times and that after the last power impulse interval of the last group respectively the generator is switched off for a pause and the pause is chosen to be so long that the power averaged over time delivered to the partial cathodes and taking into account the pauses corresponds to a predefined value.

### Claim 9 (depends on 1)

HIPIMS method comprising the method of claim 1, characterized in that the predefined output of the generator is at least 20 kW, preferably at least 40 kW and even more preferably 60 kW.

### Claim 10 (depends on 9)

HIPIMS method according to claim 9, characterized in that the parameters are chosen in such a way that the power averaged over time delivered at the partial cathodes is below 10 kW and preferably at 5 kW, wherein the discharge current density that prevails momentarily and locally on the partial cathodes is preferably greater than 0.2 A/cm2.