# US 2014/0190578 A1 · Fluid control valve and mass flow controller > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0190578 A1 - Document ID: US20140190578A1 - Status: Published application - Kind: A1 - Application number: 14/141,371 - Filed: 2013-12-26 - Published: 2014-07-10 - Earliest claimed: 2013-01-07 - Assignees: HORIBA STEC, Co., Ltd. - Applicants: Horiba Stec, Co., Ltd. - Inventors: Shigeyuki Hayashi - Web page: https://patentgrep.com/patent/US20140190578A1 ## CPC - F16K 1/42: Valve seats (for double-seat valves F16K1/44) - F16K 31/007: {Piezoelectric stacks} - G05D 7/0635: {by action on throttling means (G05D7/0688, G05D7/0694 take precedence)} - Y10T 137/7759: Responsive to change in rate of fluid flow - F16K: VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING {(devices for emptying and evacuating the excess liquid in valves or conduits F16L55/07)} - G05D: SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract In order to, in a short period of time, reduce to zero a measured flow rate value measured after fully closing a fluid control valve, the fluid control valve having a configuration suitable to decrease the inside volume of the fluid control valve is configured together with a valve element member, and a valve seat block provided with: an in-valve flow path that is formed inside of the valve seat block; and a valve seat surface that is brought into contact with or separated from a seating surface of the valve element member is provided with a cutout that is formed in a part of a protruded rim so as to be communicatively connected to a downstream side flow path. ## Claims ### Claim 1 A fluid control valve configured to include a valve seat block and a valve element member, the valve seat block comprising: an in-valve flow path that is formed inside of the valve seat block; and a valve seat surface that is brought into contact with or separated from a seating surface of the valve element member, wherein the valve seat block further comprises: one end surface part that is at an upstream end of the in-valve flow path and formed with an inflow opening connected to an upstream side flow path; the other end surface part that is at a downstream end of the in-valve flow path and formed with an outflow opening through which fluid flowing in from the inflow opening flows outside the valve seat block; a protruded rim that is protruded by a predetermined height so as to surround the outflow opening in the other end surface part, and comprises a pressed surface that is pressed toward a one end surface part side during assembly; and a cutout that is formed in a part of the protruded rim so as to be communicatively connected to a downstream side flow path. ### Claim 2 (depends on 1) The fluid control valve according to claim 1, configured such that the fluid having flowed out from the outflow opening passes through the cutout, moves along an outer circumferential surface of the valve seat block, and flows to the downstream side flow path. ### Claim 3 (depends on 1) The fluid control valve according to claim 1, wherein: the protruded rim is formed in a substantially annular shape; and three cutouts are formed in a circumferential direction at regular intervals. ### Claim 4 (depends on 1) The fluid control valve according to claim 1, wherein: an outer circumferential surface of the valve seat block is formed as a side surface of a substantially two-step cylindrical shape of which a major diameter is on the other end surface part side and a minor diameter is on the one end surface part side; and on the other end surface part side of the outer circumferential surface of the valve seat block, a cutoff part is formed by cutting off a vicinity of the cutout in an axial direction. ### Claim 5 (depends on 1) The fluid control valve according to claim 1, wherein in the one end surface part, the valve seat surface is formed so as to surround the inflow opening. ### Claim 6 (depends on 5) The fluid control valve according to claim 5, wherein in the one end surface part, an annular concave groove is formed so as to surround the inflow opening, the annular concave groove having a smaller outside diameter size than an outside diameter size of the protruded rim. ### Claim 7 (depends on 1) The fluid control valve according to claim 1, wherein in the other end surface part, the valve seat surface is formed on an inner side of the protruded rim that surrounds the outflow opening and the valve seat surface is protruded to a lower level than a level of the pressed surface. ### Claim 8 A fluid control valve configured to include a valve seat block and a valve element member, the valve seat block comprising: an in-valve flow path that is formed inside; and a valve seat surface that is brought into contact with or separated from a seating surface of the valve element member, wherein the valve seat block further comprises: a one end surface part that is at a downstream end of the in-valve flow path and formed with an outflow opening connected to a downstream side flow path; the other end surface part that is at an upstream end of the in-valve flow path and formed with an inflow opening through which fluid flows in from outside the valve seat block; a protruded rim that is protruded by a predetermined height so as to surround the inflow opening in the other end surface part and comprises a pressed surface that is pressed toward a one end surface part side during assembly; and a cutout that is formed in a part of the protruded rim so as to be communicatively connected to an upstream side flow path. ### Claim 9 (depends on 1) A mass flow controller comprising: the fluid control valve according to claim 1; and a flow rate sensor that is provided on a downstream side of the fluid control valve.