# US 2014/0190571 A1 · System for and Method of Fast Pulse Gas Delivery > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0190571 A1 - Document ID: US20140190571A1 - Status: Published application - Kind: A1 - Application number: 14/209,216 - Filed: 2014-03-13 - Published: 2014-07-10 - Earliest claimed: 2011-02-25 - Assignees: MKS Instruments, Inc. - Inventors: Junhua Ding; Michael L'Bassi; Tseng-Chung Lee - Web page: https://patentgrep.com/patent/US20140190571A1 ## CPC - G05D 7/0635: {by action on throttling means (G05D7/0688, G05D7/0694 take precedence)} - Y10T 137/0318: Processes - Y10T 137/86389: Programmer or timer - G05D: SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the mass flow controller includes an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration. ## Claims ### Claim 1 A programmable mass flow controller comprising: an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions including instructions relating to the programmed configuration of the mass flow controller, and programming data; a flow sensor configured to sense the flow of gas through the mass flow controller; a control valve configured to control the flow of gas though the mass flow controller; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller is configured and arrange to operate the mass flow controller in accordance with the programmed configuration. ### Claim 2 (depends on 1) A mass flow controller according to claim 1, wherein the programmed digital configuration enables the mass flow controller to respond to digital signals applied to the input. ### Claim 3 (depends on 1) A mass flow controller according to claim 1, wherein the programmed analog configuration enables the mass flow controller to respond to analog signals applied to the input. ### Claim 4 (depends on 1) A mass flow controller according to claim 1, wherein the communication port also is configured to receive data relating to parameters associated with at least one of two modes of operation of the mass flow controller. ### Claim 5 (depends on 4) A mass flow controller according to claim 4, wherein the at least one of two modes of operation of the mass flow controller includes a classic mass flow controller mode of operation, wherein the input signal represents the flow setpoint for operating the MFC in the classic mass flow controller mode of operation. ### Claim 6 (depends on 4) A mass flow controller according to claim 4, wherein the at least one of two modes of operation of the mass flow controller includes a pulse gas delivery mode of operation, wherein the input signal represents a pulse trigger signal for operating the MFC so as to deliver a sequence of pulses in the pulse gas delivery mode of operation. ### Claim 7 A mass flow controller according to 6, wherein the communication port is configured to receive parameters for pulse gas delivery. ### Claim 8 (depends on 7) A mass flow controller according to claim 7, wherein the parameters are associated with a mole delivery mode of gas pulse delivery operation. ### Claim 9 (depends on 8) A mass flow controller according to claim 8, wherein the parameters include the pulse-on period, pulse-off period, the mole delivery setpoint, and the number of pulses. ### Claim 10 (depends on 6) A mass flow controller according to claim 6, further including a digital communication interface that includes the digital communication port. ### Claim 11 (depends on 6) A mass flow controller according to claim 6, further including an analog communication interface having an analog input pin for forming the input and receiving an analog trigger signal input, and an analog output pin for forming the output and providing an analog synchronization signal output. ### Claim 12 (depends on 6) A mass flow controller according to claim 6, further including both a digital communication interface and an analog communication interface. ### Claim 13 (depends on 6) A mass flow controller according to claim 6, wherein the output signal represents a synchronization signal for use in synchronizing the timing of the delivery of a sequence of pulses with the operation of another device. ### Claim 14 (depends on 13) A mass flow controller according to claim 13, wherein the another device is a second mass flow controller. ### Claim 15 (depends on 14) A mass flow controller according to claim 14, wherein the synchronization signal is a trigger signal input to the second mass flow controller. ### Claim 16 (depends on 13) A mass flow controller according to claim 13, wherein the another device is an RF power generator. ### Claim 17 (depends on 13) A mass flow controller according to claim 13, wherein the another device is a pressure controller. ### Claim 18 (depends on 13) A mass flow controller according to claim 13, wherein the synchronization signal is generated prior to the completion of the delivery of the sequence of pulses. ### Claim 19 (depends on 13) A mass flow controller according to claim 13, wherein the synchronization signal is generated simultaneously with the completion of the delivery of the sequence of pulses. ### Claim 20 (depends on 13) A mass flow controller according to claim 13, wherein the synchronization signal is generated after the completion of the delivery of the sequence of pulses by a predetermined delay. ### Claim 21 (depends on 6) A mass flow controller according to claim 6, wherein the pulse trigger signal is a digital signal. ### Claim 22 (depends on 6) A mass flow controller according to claim 6, wherein the pulse trigger signal is an analog signal. ### Claim 23 (depends on 6) A mass flow controller according to claim 6, wherein the output signal is a TTL synchronization output signal for use by another device. ### Claim 24 A system comprising: a multi-channel gas delivery system including a plurality of flow channels, each channel comprising a mass flow controller configured to control the flow of gas through the corresponding channel and including: an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions including instructions on the operational configuration of each mass flow controller; a flow sensor configured to sense the flow of gas through the mass flow controller of the corresponding channel; a control valve configured to control the flow of gas though the mass flow controller of the corresponding channel; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration; wherein the input signal to the mass flow controller initiates the operation of the mass flow controller to deliver a prescribed amount of gas, and the output signal is generated as a function of the timing of the delivery so that the output signal can be used to synchronize each mass flow controller to at least one other device. ### Claim 25 (depends on 24) A system according to claim 24, wherein the output signal of at least one mass flow controller is used as an input signal to initiate the operation of another one of the mass flow controllers of the multi-channel fast pulse gas delivery system to deliver a prescribed amount of gas so that the mass flow controllers define a daisy chain of devices sequentially providing the delivery of prescribed amounts of gas through the corresponding channels. ### Claim 26 (depends on 24) A system according to claim 24, wherein the output signal of each of the mass flow controllers is used to provide control signals applied to an RF power generator. ### Claim 27 (depends on 24) A system according to claim 24, wherein the output signal of each of the mass flow controllers is used to provide control signals applied to a pressure controller. ### Claim 28 (depends on 24) A system according to claim 24, wherein the input and output signals are analog signals. ### Claim 29 (depends on 24) A system according to claim 24, wherein the digital communication port of each mass flow controller is configured to receive data relating to parameters associated with at least one of two modes of operation of the mass flow controller. ### Claim 30 (depends on 29) A system according to claim 29, wherein the at least one of two modes of operation of each mass flow controller includes a pulse gas delivery mode of operation, wherein the input signal represents a pulse trigger signal for operating the MFC so as to deliver a sequence of pulses in the pulse gas delivery mode of operation. ### Claim 31 A system according to 29, wherein the digital communication port is configured to receive parameters for pulse gas delivery. ### Claim 32 (depends on 31) A system according to claim 31, wherein the parameters are associated with a mole delivery mode of gas pulse delivery operation. ### Claim 33 (depends on 32) A system according to claim 32, wherein the parameters include the pulse-on period, pulse-off period, the mole delivery setpoint, and the number of pulses. ### Claim 34 (depends on 29) A system according to claim 29, further including a digital communication interface that includes the digital communication port. ### Claim 35 (depends on 29) A system according to claim 29, further including both a digital communication interface and an analog communication interface. ### Claim 36 (depends on 29) A system according to claim 29, further including an analog communication interface having an analog input pin for forming the input and receiving an analog trigger signal input, and an analog output pin for forming the output and providing an analog synchronization signal output. ### Claim 37 (depends on 36) A system according to claim 36, wherein the analog synchronization signal is generated prior to the completion of the delivery of the sequence of pulses. ### Claim 38 (depends on 36) A system according to claim 36, wherein the analog synchronization signal is generated simultaneously with the completion of the delivery of the sequence of pulses. ### Claim 39 (depends on 36) A system according to claim 36, wherein the analog synchronization signal is generated after the completion of the delivery of the sequence of pulses by a predetermined delay. ### Claim 40 (depends on 29) A system according to claim 29, wherein the output signal is a TTL synchronization output signal for use by another device. ### Claim 41 A method of operating a mass flow controller of the type comprising at least one communication port, the method comprising: receiving, at the communication port, program instructions including instructions relating to the operational configuration of the mass flow controller as responsive to either digital or analog input signals; and operating the mass flow controller in accordance with the programmed configuration. ### Claim 42 (depends on 41) A method of operating a mass flow controller according to claim 41, wherein a programmed digital operational configuration enables the mass flow controller to respond to digital signals applied to the input. ### Claim 43 (depends on 41) A method of operating a mass flow controller according to claim 41, wherein a programmed analog operational configuration enables the mass flow controller to respond to analog signals applied to the input. ### Claim 44 (depends on 41) A method of operating a mass flow controller according to claim 41, wherein receiving at the communication port program instructions includes receiving data relating to parameters associated with at least one of two modes of operation of the mass flow controller. ### Claim 45 (depends on 44) A method of operating a mass flow controller according to claim 44, wherein at least one of two modes of operation of the mass flow controller includes a classic mass flow controller mode of operation, and the input signal represents the set point setting for operating the MFC in the classic mass flow controller mode of operation. ### Claim 46 (depends on 44) A method of operating a mass flow controller according to claim 44, wherein at least one of two modes of operation of the mass flow controller includes a pulse gas delivery mode of operation, and further delivering a sequence of pulses in the pulse gas delivery mode of operation in response to an input signal. ### Claim 47 A method of operating a mass flow controller according to 46, wherein receiving instructions at the communication port program includes receiving parameters for pulse gas delivery. ### Claim 48 (depends on 47) A method of operating a mass flow controller according to claim 47, wherein the parameters for pulse gas delivery are associated with a mole delivery mode of gas pulse delivery operation. ### Claim 49 (depends on 48) A method of operating a mass flow controller according to claim 48, wherein the parameters include the pulse-on period, pulse-off period, the mole delivery setpoint, and the number of pulses. ### Claim 50 (depends on 46) A method of operating a mass flow controller according to claim 46, further including receiving an analog trigger signal input at an analog input pin of an analog communication interface and providing an analog synchronization signal output at an analog output pin of the analog communication interface. ### Claim 51 (depends on 46) A method of operating a mass flow controller according to claim 46, further including generating an output signal representing a synchronization signal for use in synchronizing the timing of the delivery of a sequence of pulses with the operation of another device. ### Claim 52 (depends on 51) A method of operating a mass flow controller according to claim 51, wherein the another device is a second mass flow controller. ### Claim 53 (depends on 52) A method of operating a mass flow controller according to claim 52, wherein the synchronization signal is a trigger signal for use as an input to the second mass flow controller. ### Claim 54 (depends on 51) A method of operating a mass flow controller according to claim 51, wherein the another device is an RF power generator. ### Claim 55 (depends on 51) A method of operating a mass flow controller according to claim 51, wherein the another device is a pressure controller. ### Claim 56 (depends on 53) A method of operating a mass flow controller according to claim 53, further including generating the synchronization signal prior to the completion of the delivery of the sequence of pulses. ### Claim 57 (depends on 53) A method of operating a mass flow controller according to claim 53, further including generating the synchronization signal simultaneously with the completion of the delivery of the sequence of pulses. ### Claim 58 (depends on 53) A method of operating a mass flow controller according to claim 53, further including generating the synchronization signal by a predetermined delay after the completion of the delivery of the sequence of pulses. ### Claim 59 (depends on 53) A method of operating a mass flow controller according to claim 53, wherein the trigger signal is generated as a digital signal. ### Claim 60 (depends on 53) A method of operating a mass flow controller according to claim 53, wherein the trigger signal is generated as an analog signal. ### Claim 61 (depends on 51) A method of operating a mass flow controller according to claim 51, wherein the output signal is a TTL synchronization output signal for use by another device. ### Claim 62 A method of operating a multi-channel gas delivery system including a plurality of flow channels, each channel comprising a mass flow controller configured to control the flow of gas through the corresponding channel, the method comprising: providing an input signal to one of the mass flow controllers so as to initiate the operation of the mass flow controller to deliver a prescribed amount of gas; generating an output signal from the mass flow controller as a function of the timing of the delivery of the prescribed amount of gas so that the output signal can be used to synchronize each mass flow controller to at least one other device; receiving program instructions at a communication port including instructions on the operational configuration of each mass flow controller; determining the programmed configuration of the mass flow controller as either a digital or analog configuration as a function of the received instructions; and operating the mass flow controller in accordance with the programmed configuration; wherein the input signal to the mass flow controller initiates the operation of the mass flow controller to deliver a prescribed amount of gas, and the output signal is generated as a function of the timing of the delivery so that the output signal can be used to synchronize each mass flow controller to at least one other device. ### Claim 63 (depends on 62) A method of operating a multi-channel gas delivery system according to claim 62, further including using the output signal of at least one mass flow controller as an input signal to initiate the operation of another one of the mass flow controllers of the multi-channel fast pulse gas delivery system to deliver a prescribed amount of gas so that the mass flow controllers define a daisy chain of devices sequentially providing the delivery of prescribed amounts of gas through the corresponding channels. ### Claim 64 (depends on 62) A method of operating a multi-channel gas delivery system according to claim 62, further including applying the output signal of each of the mass flow controllers as a control signal to an RF power generator. ### Claim 65 (depends on 62) A method of operating a multi-channel gas delivery system according to claim 62, further including applying the output signal of each of the mass flow controllers as a control signal to an a pressure controller. ### Claim 66 (depends on 62) A method of operating a multi-channel gas delivery system according to claim 62, wherein the input and output signals are analog signals. ### Claim 67 (depends on 62) A method of operating a multi-channel gas delivery system according to claim 62, further including receiving at a digital communication port of each mass flow controller data relating to parameters associated with at least one of two modes of operation of each such mass flow controller. ### Claim 68 (depends on 67) A method of operating a multi-channel gas delivery system according to claim 67, wherein the at least one of two modes of operation of each mass flow controller includes a pulse gas delivery mode of operation, wherein the input signal represents a pulse trigger signal for operating the MFC so as to deliver a sequence of pulses in the pulse gas delivery mode of operation. ### Claim 69 A method of operating a multi-channel gas delivery system according to 67, wherein receiving at a digital communication port of each mass flow controller data relating to parameters associated with at least one of two modes of operation of each such mass flow controller includes receiving parameters for pulse gas delivery. ### Claim 70 (depends on 69) A method of operating a multi-channel gas delivery system according to claim 69, wherein receiving at a digital communication port of each mass flow controller data relating to parameters associated with at least one of two modes of operation of each such mass flow controller includes receiving parameters associated with a mole delivery mode of gas pulse delivery operation. ### Claim 71 (depends on 70) A method of operating a multi-channel gas delivery system according to claim 70, wherein the parameters include the pulse-on period, pulse-off period, the mole delivery setpoint, and the number of pulses. ### Claim 72 (depends on 71) A method of operating a multi-channel gas delivery system according to claim 71, wherein the output signal of each mass flow controller is an analog synchronization signal, and further including generating the analog synchronization signal prior to the completion of the delivery of the sequence of pulses by the mass flow controller. ### Claim 73 (depends on 72) A method of operating a multi-channel gas delivery system according to claim 72, wherein the analog synchronization signal is generated simultaneously with the completion of the delivery of the sequence of pulses. ### Claim 74 (depends on 72) A method of operating a multi-channel gas delivery system according to claim 72, wherein the analog synchronization signal is generated after the completion of the delivery of the sequence of pulses by a predetermined delay. ### Claim 75 (depends on 71) A method of operating a multi-channel gas delivery system according to claim 71, wherein the output signal of each mass flow controller is a TTL synchronization output signal for use by another device.