# US 2014/0190542 A1 · Wafer scale thermoelectric energy harvester

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- Number: US 2014/0190542 A1
- Document ID: US20140190542A1
- Status: Published application
- Kind: A1
- Application number: 14/066,129
- Filed: 2013-10-29
- Published: 2014-07-10
- Earliest claimed: 2013-01-08
- Assignees: Analog Devices Technology
- Inventors: William Allan LANE; Baoxing CHEN
- Web page: https://patentgrep.com/patent/US20140190542A1

## CPC

- H10N 10/17: characterised by the structure or configuration of the cell or thermocouple forming the device
- H10N 19/00: Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

An integrated circuit may include a substrate and a dielectric layer formed over the substrate. A plurality of p-type thermoelectric elements and a plurality of n-type thermoelectric elements may be disposed within the dielectric layer. The p-type thermoelectric elements and the n-type thermoelectric elements may be connected in series while alternating between the p-type and the n-type thermoelectric elements.

## Claims

### Claim 1

A thermoelectric harvester, comprising:
a pair of layers at least on for coupling to a heat source;
a plurality of thermoelectric elements disposed within a space between the layers and having a run length that is greater than a distance of separation between the layers, wherein:
the thermoelectric elements are electrically coupled together in series in alternating device types, and
the thermoelectric elements are coupled to both of the layers at opposite ends thereof.

### Claim 2 (depends on 1)

The thermoelectric harvester of claim 1, further comprising a thermal contact layer disposed above the thermoelectric elements.

### Claim 3 (depends on 1)

The thermoelectric harvester of claim 1, wherein each thermoelectric element has a top and a bottom, wherein the top of one thermoelectric element is connected to the top of a first adjacent thermoelectric element and the bottom of the one thermoelectric element is connected to the bottom of a second adjacent thermoelectric element.

### Claim 4 (depends on 3)

The thermoelectric harvester of claim 3, wherein the thermoelectric elements are connected via interconnects and a barrier metal is included between each interconnect and the thermoelectric elements.

### Claim 5 (depends on 1)

The thermoelectric harvester of claim 1, wherein the thermoelectric elements include p-type thermoelectric elements and n-type thermoelectric elements connected in series while alternating between the p-type and the n-type thermoelectric elements.

### Claim 6 (depends on 5)

The thermoelectric harvester of claim 5, where the p-type or n-type thermoelectric elements are superlattices.

### Claim 7 (depends on 5)

The thermoelectric harvester of claim 5, wherein each p-type thermoelectric element is adjacent to only n-type thermoelectric elements.

### Claim 8 (depends on 1)

The thermoelectric harvester of claim 1, further comprising a dielectric layer disposed between the thermoelectric elements and one of the layers.

### Claim 9 (depends on 8)

The thermoelectric harvester of claim 8, wherein the dielectric layer is a polyimide layer.

### Claim 10 (depends on 8)

The thermoelectric harvester of claim 8, wherein the thermoelectric elements have higher thermal conductivity than the thermal conductivity of the dielectric layer.

### Claim 11 (depends on 1)

The thermoelectric harvester of claim 1, further comprising a substrate disposed adjacent to one of the layers outside of the space between the layers, the substrate including a cavity in a surface that is adjacent to the layer.

### Claim 12

A thermoelectric harvester, comprising:
a substrate;
a dielectric layer formed over the substrate;
a plurality of thermoelectric elements disposed within the dielectric layer, the thermoelectric elements having a run length that is greater than a distance of separation between the first and second thermal conductor layers; and
wherein the thermoelectric elements are electrically coupled together in series in alternating device types.

### Claim 13 (depends on 12)

The thermoelectric harvester of claim 12, wherein the thermoelectric elements are connected via interconnects and a barrier metal is included between each interconnect and the thermoelectric elements.

### Claim 14 (depends on 12)

The thermoelectric harvester of claim 12, wherein the thermoelectric elements include p-type thermoelectric elements and n-type thermoelectric elements connected in series while alternating between the p-type and the n-type thermoelectric elements.

### Claim 15 (depends on 14)

The thermoelectric harvester of claim 14 wherein each p-type thermoelectric element is adjacent to only n-type thermoelectric elements.

### Claim 16 (depends on 12)

The thermoelectric harvester of claim 12, wherein each thermoelectric element has a top and a bottom, wherein the top of one thermoelectric element is connected to the top of a first adjacent thermoelectric element and the bottom of the one thermoelectric element is connected to the bottom of a second adjacent thermoelectric element.

### Claim 17

A thermoelectric harvester, comprising:
a substrate including a first thermal conductor layer on a first surface of the substrate;
a second thermal conductor layer disposed above the first thermal conductor layer;
a plurality of p-type thermoelectric elements disposed between the first thermal conductor layer and the second thermal conductor layer, the p-type thermoelectric elements having a run length that is greater than a distance of separation between the first and second thermal conductor layers;
a plurality of n-type thermoelectric elements disposed between the first thermal conductor layer and the second thermal conductor layer, the n-type thermoelectric elements having a run length that is greater than a distance of separation between the first and second thermal conductor layers; and
wherein the p-type thermoelectric elements and the n-type thermoelectric elements are connected in series while alternating between the p-type and the n-type thermoelectric elements.

### Claim 18 (depends on 17)

The thermoelectric harvester of claim 17, further comprising a thermoplastic between the thermoelectric elements and the first thermal conductor layer.

### Claim 19 (depends on 18)

The thermoelectric harvester of claim 18, wherein the thermoelectric elements are provided on sloped surfaces of the thermoplastic.

### Claim 20 (depends on 17)

The thermoelectric harvester of claim 17, wherein the substrate include a cavity in the first surface of the substrate.

### Claim 21 (depends on 17)

The thermoelectric harvester of claim 17, further comprising:
a thermoplastic between the thermoelectric elements and the first thermal conductor layer; and
a cavity in the first surface of the substrate and under the thermoplastic.

### Claim 22 (depends on 17)

The thermoelectric harvester of claim 17, wherein each thermoelectric element has a top and a bottom, wherein the top of one thermoelectric element is connected to the top of a first adjacent thermoelectric element and the bottom of the one thermoelectric element is connected to the bottom of a second adjacent thermoelectric element.

### Claim 23 (depends on 17)

The thermoelectric harvester of claim 17, further comprising a second substrate provided on a first surface of the second thermal conductor layer that is opposite to a second surface adjacent to the thermoelectric elements.

### Claim 24 (depends on 17)

The thermoelectric harvester of claim 17, wherein the thermoelectric elements are connected via interconnects and a barrier metal is included between each interconnect and the thermoelectric elements.
