# US 2014/0190532 A1 · Nozzle cleaning device and coater provided with it > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0190532 A1 - Document ID: US20140190532A1 - Status: Published application - Kind: A1 - Application number: 13/824,420 - Filed: 2013-01-25 - Published: 2014-07-10 - Earliest claimed: 2013-01-10 - Assignees: Shenzhen China Star Optoelectronics Technology Co., Ltd. - Inventors: Yueyan Zhang; Wende Huang; Houyi Zhu - Web page: https://patentgrep.com/patent/US20140190532A1 ## CPC - B08B 9/027: Cleaning the internal surfaces; Removal of blockages - B05B 15/52: for removal of clogging particles - B05B 15/55: using cleaning fluids - G03F 7/16: Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) - B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL - B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A nozzle cleaning device and a coater provided with the nozzle cleaning device are provided, the nozzle cleaning device comprise a cleaner, a vacuum pipe and a vacuum pump; the cleaner has a recessed hole coinciding in shape with the nozzle of the coater for receiving the nozzle of the coater, and the inner wall of the recessed hole is provided with a plurality of through-holes; one end of the vacuum pipe is connected to said a plurality of through-holes, and the other end of the vacuum pipe is connected to the vacuum pump. The nozzle cleaning device of the present invention can be used conveniently to remove the photoresist residue so as to clean the nozzle, which effectively improves the product yield and the production efficiency, and reduces the cost due to needing no expensive nanomaterials. ## Claims ### Claim 1 A nozzle cleaning device comprising a cleaner, a vacuum pipe and a vacuum pump; the cleaner has a recessed hole coinciding in shape with the nozzle of the coater for receiving the nozzle of the coater, and the inner wall of the recessed hole is provided with a plurality of through-holes; one end of the vacuum pipe is connected to said a plurality of through-holes, and the other end of the vacuum pipe is connected to the vacuum pump. ### Claim 2 (depends on 1) The nozzle cleaning device of claim 1, wherein, the through-holes are arranged at the bottom of the inner wall of the recessed hole. ### Claim 3 (depends on 2) The nozzle cleaning device of claim 2, wherein, the through-holes are also arranged at both sides of the inner wall of the recessed hole. ### Claim 4 (depends on 1) The nozzle cleaning device of claim 1, wherein, the cleaner is made of rubber material. ### Claim 5 A coater comprising: a coating liquid output device filled with coating liquid, including a nozzle through which the coating liquid is sprayed; a nozzle cleaning device including a cleaner, a vacuum pipe and a vacuum pump, the cleaner has a recessed hole coinciding in shape with the nozzle of the coater for receiving the nozzle of the coater, the inner wall of the recessed hole is provided with a plurality of through-holes; one end of the vacuum pipe is connected to said a plurality of through-holes, and the other end of the vacuum pipe is connected to the vacuum pump; and a transmission device connected to the bottom of the cleaning device, operable to controlling the movement of the cleaning device and providing a driving force to make the cleaning device up and down. ### Claim 6 (depends on 5) The coater of claim 5, wherein, the cleaning device includes a base, to which the transmission device is connected for supporting the cleaning device. ### Claim 7 (depends on 5) The coater of claim 5, wherein, the length of the cleaner is it as that of the nozzle. ### Claim 8 (depends on 5) The coater of claim 5, wherein, the through-holes are arranged at the bottom of the inner wall of the recessed hole. ### Claim 9 (depends on 8) The coater of claim 8, wherein, the through-holes at the bottom of the recessed hole are offset with respect to the internal pipe of the nozzle of the coater. ### Claim 10 (depends on 8) The coater of claim 8, wherein, the through-holes are also arranged at both sides of the inner wall of the recessed hole. ### Claim 11 A coater comprising: a coating liquid output device filled with coating liquid, including a nozzle through which the coating liquid is sprayed; and a nozzle cleaning device including a cleaner, a vacuum pipe, a vacuum pump, and a movable base; the cleaner is mounted on the base and it has a recessed hole coinciding in shape with the nozzle of the coater for receiving the nozzle of the coater, the inner wall of the recessed hole is provided with a plurality of through-holes; one end of the vacuum pipe is connected to said a plurality of through-holes, and the other end of the vacuum pipe is connected to the vacuum pump ### Claim 12 (depends on 11) The coater of claim 11, wherein, the length of the cleaner is it as that of the nozzle. ### Claim 13 (depends on 11) The coater of claim 11, wherein, the through-holes are arranged at the bottom of the inner wall of the recessed hole. ### Claim 14 (depends on 13) The coater of claim 13, wherein, the through-holes at the bottom of the recessed hole are offset with respect to the internal pipe of the nozzle of the coater. ### Claim 15 (depends on 13) The coater of claim 13, wherein, the through-holes are also arranged at both sides of the inner wall of the recessed hole.