# US 2014/0190402 A1 · Apparatus and method for manufacturing ingot

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- Number: US 2014/0190402 A1
- Document ID: US20140190402A1
- Status: Published application
- Kind: A1
- Application number: 14/123,325
- Filed: 2012-06-01
- Published: 2014-07-10
- Earliest claimed: 2011-06-01
- Assignees: LG Innotek Co., Ltd.
- Inventors: Dong Geun Shin
- Web page: https://patentgrep.com/patent/US20140190402A1

## CPC

- C30B 23/025: {characterised by the substrate}
- C30B 29/36: Carbides
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR

## Abstract

Disclosed are an apparatus and a method for fabricating an ingot. The apparatus includes a crucible receiving source materials therein; a holder fixing a seed located above the source materials; and an adhesive layer interposed between the holder and the seed and chemically bonded to the seed.

## Claims

### Claim 1

An apparatus for fabricating an ingot, the apparatus comprising:
a crucible containing source materials therein;
a holder fixing a seed located above the source materials; and
an adhesive layer interposed between the holder and the seed and chemically bonded to the seed.

### Claim 2 (depends on 1)

The apparatus of claim 1, wherein the adhesive layer includes a compound of silicon and carbon.

### Claim 3 (depends on 2)

The apparatus of claim 2, wherein the holder includes the carbon and the seed includes silicon carbide.

### Claim 4 (depends on 1)

The apparatus of claim 1, wherein the adhesive layer has a thickness of about 0.1 μm to about 10 μm.

### Claim 5 (depends on 1)

The apparatus of claim 1, wherein the holder includes a plurality of pores, and a part of the adhesive layer is filled in the pores.

### Claim 6 (depends on 1)

The apparatus of claim 1, wherein the adhesive layer includes silicon carbide.

### Claim 7

A method for fabricating an ingot, the method comprising:
forming a preliminary adhesive layer including silicon between a holder and a seed;
forming an adhesive layer chemically bonded to the seed by heating the preliminary adhesive layer; and
growing a silicon carbide crystal on the seed by using source materials including silicon and carbon.

### Claim 8 (depends on 7)

The method of claim 7, wherein the preliminary adhesive layer includes polymer having a bonding structure of silicon and carbon.

### Claim 9 (depends on 7)

The method of claim 7, wherein the preliminary adhesive layer includes carbosilane polymer.

### Claim 10 (depends on 7)

The method of claim 7, wherein the carbosilane polymer includes one selected from the group consisting of allylhydrido polycarbosilane, polycarbosilane and polyphenylcarbosilane).

### Claim 11 (depends on 7)

The method of claim 7, wherein the forming of the preliminary adhesive layer comprises:
forming a paste by mixing carbosilane polymer with a solvent; and
coating the paste onto the holder.

### Claim 12 (depends on 11)

The method of claim 11, wherein the carbosilane polymer is mixed with the solvent in a rate of 10 wt % to 50 wt %.

### Claim 13 (depends on 11)

The method of claim 11, wherein the forming of the paste comprises:
forming a first paste and a second paste having viscosity higher than viscosity of the first paste by mixing the carbosilane polymer with the solvent, and
the forming of the preliminary adhesive layer comprises:
forming a first preliminary adhesive layer by coating the first paste onto the holder; and
forming a second preliminary adhesive layer by coating the second paste onto the first preliminary adhesive layer.

### Claim 14 (depends on 13)

The method of claim 13, wherein the holder is formed with a plurality of pores and the first paste is filled in the pores.