Electrostatic micro relay and manufacturing method for the same

A manufacturing method for an electrostatic micro relay, comprising the steps of:

• forming a substrate;
• and
• forming a signal line on the substrate, wherein
• the signal line has an input point configured to receive a signal and a plurality of signal channels configured to distribute the signal, the plurality of signal channels being each formed with a fixed contact,
• the manufacturing method further comprises the steps of:
• forming a plurality of movable contacts, each provided with respect to each of the fixed contacts and arranged so as to be opposed to a corresponding fixed contact across a space, and a plurality of movable electrodes, each connected to each of the plurality of movable contacts;
• forming a cap with a through via and a space configured to house the plurality of movable electrodes;
• and
• bonding the cap with the substrate by a sealing material, and
• the through via in the cap is connected to the input point of the signal line in the bonding step.

A manufacturing method for an electrostatic micro relay, comprising the steps of:

• forming a substrate;
• and
• forming on the substrate a signal line and a through via to be connected to the signal line, wherein
• the signal line has an input point configured to receive a signal and a plurality of signal channels configured to distribute the signal,
• the plurality of signal channels are each formed with a fixed contact,
• the through via is connected to the input point of the signal line, and
• the manufacturing method further comprises the steps of:
• forming a plurality of movable contacts, each provided with respect to each of the fixed contacts and arranged so as to be opposed to a corresponding fixed contact across a space, and a plurality of movable electrodes, each connected to each of the plurality of movable contacts;
• forming a cap with a through via and a space configured to house the plurality of movable electrodes;
• and
• bonding the cap with the substrate by a sealing material.