Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
AssigneeFutrfab, Inc.
InventorFrederick A. Flitsch
Life of this patent
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Abstract
The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. The operation may be fully automated. In another aspect, the invention describes Cleanspace fabricators which use devices to routinely remove and place tooling.
Claims19
A Cleanspace fabricator comprising:
- multiple processing tools which are oriented in a multilevel environment;
- and an automated tool replacement system.
A method of operating a fabricator comprising the steps of
- placing and replacing tools by the use of robotic handlers and
- moving substrates from fabricator tools to fabricator tools within a Cleanspace by robotic automation.
An apparatus for transporting a fabricator tool to or from an operational position, the apparatus comprising:
- a tool replacement system;
- a robotic tool handler within said tool replacement system;
- a support structure supporting the tool replacement system and comprising automation for transporting the tool replacement system in at least one of a horizontal direction and a vertical direction.
Dependencies are inferred from the claim text.