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US 2014/0179204 A1Published application
Dresser
AssigneeEbara Corporation
InventorHiroyuki Shinozaki
Life of this patent
Estimating the term…
Abstract
A dresser includes an attachment secured to a dresser shaft for rotating the dresser, a disk holder removably attached to the attachment by a magnetic force, and a dresser disk removably attached to the disk holder. The dresser disk has a dressing surface. Each of the attachment and the disk holder has magnet for generating the magnetic force.
Claims11
A dresser for dressing a polishing pad, comprising:
- an attachment secured to a dresser shaft for rotating the dresser;
- a disk holder removably attached to the attachment by a magnetic force;
- and
- a dresser disk removably attached to the disk holder, the dresser disk having a dressing surface,
- wherein each of the attachment and the disk holder has magnet for generating the magnetic force.
2 more elements
A dresser for dressing a polishing pad, comprising:
- an attachment secured to a dresser shaft for rotating the dresser;
- and
- a brush disk removably attached to the attachment by a magnetic forces, the brush disk having a dressing surface, wherein each of the attachment and the brush disk has magnet for generating the magnetic three.
Dependencies are inferred from the claim text.