Method for fabricating absorbing layer of solar cell and thermal treatment device thereof
AssigneeIndustrial Technology Research Institute
InventorsTsung-Shin Wu, Shih-Hsiung Wu, Chia-Wen Chang, Hung-Ru Hsu
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Abstract
A method for fabricating an absorbing layer of a solar cell and a thermal treatment device thereof adapted for forming an absorbing layer on a substrate are disclosed. The method includes the following steps. First, a solid-phase vapor source in a chamber and an absorbing layer precursor on a substrate are maintained by a predetermined distance. The solid-phase vapor source contains tin. The absorbing layer precursor contains copper, zinc, tin and sulfur. The temperature inside the chamber is raised to a forming temperature, so that the absorbing layer precursor forms an absorbing layer on the substrate.
Claims33
A method for fabricating an absorbing layer of a solar cell, comprising:
- maintaining a predetermined distance between a solid-phase vapor source in a chamber and an absorbing layer precursor on a substrate in the chamber, wherein the solid-phase vapor source contains tin and the absorbing layer precursor contains copper, zinc, tin and sulfur;
- and
- raising the temperature inside the chamber to a forming temperature, so that the absorbing layer precursor forming an absorbing layer on the substrate.
A thermal treatment device, used for performing a thermal treatment on an absorbing layer precursor on a substrate of a solar cell, the absorbing layer precursor containing copper, zinc, tin and sulfur, the thermal treatment device comprising:
- a first chamber having a base, and the substrate being disposed on the base;
- adapted for selectively moving with the solid-phase vapor source in the first chamber to maintain a predetermined distance between the solid-phase vapor source and the absorbing layer precursor, the solid-phase vapor source contains tin;
- and
- a temperature controller assembled in the first chamber, wherein the temperature controller is adapted for adjusting the temperature in the first chamber.
A thermal treatment device, used for performing a thermal treatment on an absorbing layer precursor on a substrate of a solar cell, the absorbing layer precursor containing copper, zinc, tin and sulfur, the thermal treatment device comprising:
- a chamber having a heating zone and a thermal treatment zone in sequence, the temperature in the heating zone is lower than the temperature in the thermal treatment zone, wherein a solid-phase vapor source is disposed in the thermal treatment zone, and the solid-phase vapor source contains tin;
- a mobile carrier movably disposed in the chamber, wherein the mobile carrier is adapted for moving from the heating zone to the thermal treatment zone along a first direction, and the substrate is disposed on the mobile carrier;
- and
- a temperature controller, assembled at the chamber, wherein the temperature controller is adapted for adjusting the temperature in the chamber;
- wherein, when the mobile carrier moves to the thermal treatment zone, the absorbing layer precursor on the substrate and the solid-phase vapor source are kept by a predetermined distance.
Dependencies are inferred from the claim text.