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US 2014/0179051 A1Published application
Method of manufacturing an organic light-emitting display device
AssigneeSamsung Display Co., Ltd.
InventorJune-Woo Lee
Life of this patent
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Abstract
A method of forming an organic light-emitting display in which a pixel electrode is formed by extending from source and drain electrodes, a capacitor including a thin upper capacitor electrode formed below the pixel electrode and constituting a metal-insulator-metal (MIM) CAP structure, thereby simplifying manufacturing processes, increasing an aperture ratio, and improving a voltage design margin.
Claims7
A method of manufacturing an organic light-emitting display device, the method comprising:
- a first mask operation comprising forming a semiconductor layer on a substrate, and forming an active layer of a thin film transistor and a lower capacitor electrode by patterning the semiconductor layer;
- a second mask operation comprising forming a first insulating layer on the substrate so as to cover the active layer and the lower capacitor electrode, sequentially stacking a first conductive material on the first insulating layer, and a second conductive material with a different etching selectivity ratio from the first conductive material on the first insulating layer, forming, by patterning, a gate electrode comprising the first conductive material and the second conductive material, and forming, by patterning, an upper capacitor electrode comprising the first conductive material;
- a third mask operation comprising forming a second insulating layer on a resulting structure of the second mask operation, and forming contact holes exposing a portion of the active layer by patterning the second insulating layer;
- and
- a fourth mask operation comprising forming a third conductive material on a resulting structure of the third mask operation, forming source and drain electrodes by patterning the third conductive material, and forming a pixel electrode by extending one of the source and the drain electrode so as to cover an area comprised of an entire portion where the upper capacitor electrode is formed.
2 more elements
Dependencies are inferred from the claim text.