Back to results
US 2014/0179033 A1Published application
Methods for Forming Templated Materials
AssigneeIntermolecular, Inc.
InventorsMonica Mathur, Michael Miller, Prashant B. Phatak
Life of this patent
Estimating the term…
Abstract
Methods of forming layers can comprise defining a plurality of discrete site-isolated regions (SIRs) on a substrate, forming a first layer on one of the discrete SIRs, forming a second layer on the first layer, measuring a lattice parameter or an electrical property of the second layer, The process parameters for the formation of the first layer are varied in a combinatorial manner between different discrete SIRs to explore the possible layers that can result in suitable lattice matching for second layer of a desired crystalline structure.
Claims19
A method of forming layers comprising
- defining a plurality of site-isolated regions (SIRs) on a substrate,
- forming a first layer on one or more of the SIRs,
- forming a second layer on the first layer,
- wherein the first layer may function as a template layer for the second layer;
- measuring a property of the second layer;
- wherein process parameters for the formation of the first layer are varied in a combinatorial manner between different SIRs.
3 more elements
Dependencies are inferred from the claim text.