Dissolution Rate Monitor
AssigneeIntermolecular, Inc.
InventorGeorge Mirth
Life of this patent
Estimating the term…
Abstract
A multiple channel site-isolated reactor system and method are described. The system contains a reactor block with a plurality of reactors. Input lines are coupled to each reactor to provide a fluid to the respective reactors. A sealing element associated with each reactor contacts a surface of a substrate disposed below the reactor block, which defines isolated regions on the surface of the substrate. A dissolution rate monitor extends into each reactor to monitor a rate of real-time dissolution of one or more layers on the surface of the substrate when it is disposed proximate to the surface of the substrate.
Claims20
A multiple channel site-isolated reactor system, comprising:
- a plurality of reactors;
- one or more fluid input lines accessing a first end of each of the plurality of reactors;
- a sealing element disposed at a second end of each of the plurality of reactors, wherein the sealing element is configured to form a sealing contact with a surface of a substrate;
- and
- a dissolution rate monitor extending into each of the plurality of reactors, wherein the dissolution rate monitor is operable to monitor a rate of real-time dissolution of one or more layers on the surface of the substrate when disposed near the surface of the substrate.
A method of monitoring a dissolution rate of a semiconductor substrate, the method comprising:
- providing a semiconductor substrate comprising one or more layers;
- isolating a plurality of regions of a surface of the semiconductor substrate by contacting a sealing element of a reactor with the surface of the semiconductor substrate for each of the plurality of regions;
- applying one or more fluids to each of the plurality of regions of the surface through the reactor;
- and
- monitoring a real-time rate of dissolution of the semiconductor substrate via a dissolution rate monitor disposed within each of the plurality of regions.
A multiple channel site-isolated reactor system, comprising:
- a reactor block defining a plurality of reactors;
- input lines accessing each reactor of the plurality of reactors, the input lines configured to provide a fluid to respective reactors;
- a sealing element associated with each reactor of the plurality of reactors, the sealing element configured to contact a surface of a substrate disposed below the reactor block thereby defining isolated regions on the surface of the substrate;
- and
- a dissolution rate monitor extending into each reactor of the plurality of reactors, wherein the dissolution rate monitor is operable to monitor a rate of real-time dissolution of one or more layers on the surface of the substrate when disposed proximate to the surface of the substrate.
Dependencies are inferred from the claim text.