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US 2014/0178713 A1Published application
Magnetic read sensor with dual layer insulation
AssigneeHGST Netherlands B.V.
InventorsQuang Le, Simon H. Liao, Guangli Liu
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Abstract
A magnetic read sensor having reduced hard bias free layer spacing and improved insulation robustness between the hard bias layers and the shield and sensor. The read sensor has a novel bi-layer insulation layer that can be made very thin while also providing good electrical insulation to prevent sense current shunting. The bi-layer insulation layer can be made by a process that provides improved sensor performance.
Claims19
A method for manufacturing a magnetic read sensor, comprising:
- forming a sensor structure having first and second sides over a magnetic shield;
- depositing a first insulation layer over the sensor structure by ion beam deposition or physical vapor deposition;
- and
- depositing a second insulation layer by atomic layer deposition over the first insulation layer.
1 more element
The method as in claim 12, further comprising, after depositing the second insulation layer:
- depositing a layer of hard bias material;
- depositing a hard bias capping layer;
- performing a liftoff process to remove the mask;
- and
- performing a chemical mechanical polishing.
2 more elements
A magnetic read sensor, comprising:
- a magnetic shield;
- a sensor stack haying a side formed on the magnetic shield;
- and
- a bi-layer insulation layer formed over the side of the sensor stack and over the magnetic shield, the bi-layer insulation layer having a first insulation layer and a second insulation layer formed over the first insulation layer.
1 more element
Dependencies are inferred from the claim text.