Back to results
US 2014/0178679 A1Published application
AlON Coated Substrate with Optional Yttria Overlayer
AssigneeEntegris, Inc.
InventorNilesh Gunda
Life of this patent
Estimating the term…
Abstract
A fluorine plasma resistant coating on a ceramic substrate is disclosed. In one embodiment the composition includes an AlON coating that is about 2 microns thick that overlies a substrate, and having an optional yttria coating layer that is about 3 microns thick overlies the AlON coating.
Claims8
A substrate comprising a layer of AlON overlying the substrate and a optional layer of yttria overlying the AlON.
Dependencies are inferred from the claim text.