Antireflection coatings

A method of making an antireflection coating on a glass substrate comprising

• applying a coating precursor solution comprising a sol-gel precursor to a glass substrate,
• heating the coating precursor solution to form a xerogel coating, and
• fluorine-doping the coating such that fluorine is covalently incorporated as Si—F bonds;
• wherein the fluorine-doping is performed by one or more of the following:
• utilizing a coating precursor solution comprising a first fluorine source, contacting the xerogel coating with a second fluorine source, or a combination thereof;
• and
• wherein a refractive index of the xerogel coating is less than a refractive index of the glass substrate.

A method of making an antireflection coating on a glass substrate comprising

• applying a coating precursor solution comprising a sol-gel precursor to a glass substrate,
• heating the coating precursor solution to form a xerogel coating, and
• fluorine-doping the coating such that fluorine is covalently incorporated as Si—F bonds;
• wherein the fluorine-doping is performed by utilizing a coating precursor solution comprising a fluorinated sol-gel precursor having a Si—F bond, a fluorogenic precursor, a soluble fluoride compound, or mixtures thereof;
• and
• wherein a refractive index of the xerogel coating is less than a refractive index of the glass substrate.

A method of making an antireflection coating on a glass substrate comprising

• applying a coating precursor solution comprising a sol-gel precursor to a glass substrate,
• heating the coating precursor solution to form a xerogel coating, and
• contacting the xerogel coating with a fluorine source such that fluorine is covalently incorporated as Si—F bonds;
• wherein the fluorine source is a reactive fluorine gas, liquid, or plasma, and
• wherein a refractive index of the xerogel coating is less than a refractive index of the glass substrate.