Deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorsWon Yong Kim, Jin Hong Jeun
Life of this patent
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Abstract
A deposition apparatus includes a vacuum chamber, a substrate disposed in the vacuum chamber, a deposition source disposed in the vacuum chamber and facing the substrate to provide a deposition material onto the substrate, a laser oscillator generating a first laser beam, and an optical unit connected to a first side of the vacuum chamber and splitting the first laser beam to generate a plurality of mask laser beams. The mask laser beams are irradiated into the vacuum chamber to be disposed between the substrate and the deposition source. The deposition material making contact with the mask laser beams is oxidized, and the deposition material passing through the mask laser beams is deposited on the substrate.
Claims17
A deposition apparatus comprising:
- a vacuum chamber;
- a substrate disposed in the vacuum chamber;
- a deposition source disposed in the vacuum chamber and facing the substrate to provide a deposition material onto the substrate;
- a laser oscillator that generates a first laser beam;
- and
- an optical unit connected to a first side of the vacuum chamber and splitting the first laser beam to generate a plurality of mask laser beams, wherein the mask laser beams are irradiated into the vacuum chamber to be disposed between the substrate and the deposition source, the deposition material making contact with the mask laser beams is oxidized, and the deposition material passing through the mask laser beams is deposited on the substrate.
A method of depositing a deposition material onto a substrate, comprising:
- disposing the substrate in a vacuum chamber;
- generating a first laser beam;
- splitting the first laser beam to generate a plurality of mask laser beams;
- providing the deposition material;
- and
- irradiating the mask laser beams into the vacuum chamber onto the deposition material, such that the deposition material making contact with the mask laser beams is oxidized, and the deposition material passing through the mask laser beams is deposited on the substrate.
Dependencies are inferred from the claim text.