Electrode manufacturing apparatus for lithium ion capacitor and electrode manufacturing method therefor
AssigneeTokyo Electron Limited
InventorsYoshiyuki Kobayashi, Satoshi Taga
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Abstract
A time for doping an electrode material on an electrode sheet with a lithium ion can be reduced. The electrode manufacturing apparatus includes a processing chamber 200 to and from which the electrode sheet is loaded and unloaded; a rare gas supply unit 230 configured to introduce a rare gas into the processing chamber; an exhaust device 220 configured to exhaust an inside of the processing chamber to a certain vacuum level; and a lithium thermal spraying unit 210 configured to dope a carbon material C with the lithium ion by forming a lithium thin film on the carbon material of the electrode sheet W loaded into the processing chamber while melting and spraying lithium-containing powder.
Claims7
An apparatus of manufacturing an electrode for a lithium ion capacitor by doping an electrode material on an electrode sheet with a lithium ion, the electrode manufacturing apparatus comprising:
- a processing chamber to and from which the electrode sheet is loaded and unloaded;
- a rare gas supply unit configured to introduce a rare gas into the processing chamber;
- an exhaust device configured to exhaust an inside of the processing chamber to a predetermined vacuum level;
- and
- a lithium thermal spraying unit configured to dope the electrode material with the lithium ion by forming a lithium thin film on the electrode material of the electrode sheet loaded into the processing chamber while melting and spraying lithium-containing powder.
A method of manufacturing an electrode for a lithium ion capacitor by doping an electrode material on an electrode sheet with a lithium ion, the electrode manufacturing method comprising:
- depressurizing an inside of a processing chamber, to and from which the electrode sheet is loaded and unloaded, under a rare gas atmosphere;
- and
- doping the electrode material with the lithium ion by forming a lithium thin film on the electrode material of the electrode sheet loaded into the processing chamber while melting and spraying lithium-containing powder.
Dependencies are inferred from the claim text.