Combinatorial Methods and Systems for Developing Thermochromic Materials and Devices
AssigneeIntermolecular, Inc.
InventorsJeroen Van Duren, Sang Lee, Sandeep Nijhawan
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Abstract
Embodiments provided herein describe methods and systems for evaluating thermochromic material processing conditions. A plurality of site-isolated regions on at least one substrate are designated. A first thermochromic material is formed on a first of the plurality of site-isolated regions on the at least one substrate with a first set of processing conditions. A second thermochromic material is formed on a second of the plurality of site-isolated regions on the at least one substrate with a second set of processing conditions. The second set of processing conditions is different than the first set of processing conditions.
Claims20
A method for evaluating thermochromic material processing conditions, the method comprising:
- providing a plurality of site-isolated regions on at least one substrate;
- forming a first thermochromic material on a first of the plurality of site-isolated regions on the at least one substrate with a first set of processing conditions;
- and
- forming a second thermochromic material on a second of the plurality of site-isolated regions on the at least one substrate with a second set of processing conditions,
- wherein the second set of processing conditions is different than the first set of processing conditions.
A method for evaluating thermochromic material processing conditions, the method comprising:
- positioning a substrate in a processing chamber, the substrate having a plurality of site-isolated regions thereon;
- forming a first thermochromic material on a first of the plurality of site-isolated regions on the substrate with a first set of processing conditions;
- and
- forming a second thermochromic material on a second of the plurality of site-isolated regions on the substrate with a second set of processing conditions,
- wherein the second set of processing conditions is different than the first set of processing conditions.
A method for evaluating thermochromic material processing conditions, the method comprising:
- positioning a substrate in a processing chamber having at least one target positioned therein, the at least one target comprising thermoelectric material, the substrate having a plurality of site-isolated regions thereon;
- causing the thermoelectric material to be ejected from the at least one target under a first set of processing conditions such that the thermoelectric material is deposited on a first of the plurality of site-isolated regions on the substrate;
- and
- causing the thermoelectric material to be ejected from the at least one target under a second set of processing conditions such that the thermoelectric material is deposited on a second of the plurality of site-isolated regions on the substrate;
- wherein the second set of processing conditions is different than the first set of processing conditions.
Dependencies are inferred from the claim text.