Method and Apparatus for Focusing Miniature Ultrasound Transducers

A method of fabricating an ultrasound transducer, the method comprising:

• providing a wafer having a first side and a second side opposite the first side;
• forming a transducer membrane over the first side of the wafer, the transducer membrane including a piezoelectric component;
• forming an opening in the wafer from the second side;
• partially filling the opening with an epoxy material in a manner such that a predetermined amount of head space is reserved in the well;
• applying air pressure to the transducer membrane from the first side to deflect a portion of the transducer membrane towards the second side;
• and
• curing the epoxy material by heat during the applying the air pressure.

A method of shaping a transducer, comprising:

• providing a wafer having a first side and a second side opposite the first side;
• forming a multi-layered transducer membrane over the first side of the wafer, one of the layers of the transducer membrane being a piezoelectric layer;
• forming a well in the wafer, the well being open to the second side;
• dispensing an epoxy material into a sidewall of the well in a manner so as to induce a capillary effect that causes the well to be partially filled substantially without air bubbles;
• deflecting the transducer membrane by applying pressurized air from the first side until the transducer membrane achieves an arcuate shape;
• and
• curing the epoxy material while the transducer membrane is deflected.