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US 2014/0178572 A1Published application
Formaldehyde free electroless copper plating compositions and methods
AssigneeRohm and Haas Electronic Materials LLC
InventorsAndy Lok-Fung CHOW, Dennis Kwok-Wai YEE, Crystal P. L. LI
Life of this patent
Estimating the term…
Abstract
The copper electroless baths are formaldehyde free and are environmentally friendly. The electroless copper baths include one or more sulfinate compounds as reducing agents to replace formaldehyde. The electroless baths are stable and deposit a bright copper on substrates.
Claims9
A composition comprising one or more sources of copper ions, one or more chelating agents and one or more reducing agents having formula:
- wherein Xy+ is a neutralizing counter cation of formula (I), where y+ is an integer of one or greater and may be H+, ammonium cation, quaternary ammonium cation, sulfonium cation, phosphonium cation, pyridinium cation, monovalent metal cation, multivalent metal cation or divalent organometallic cation;
- R and R′ are independently hydrogen, hydroxy, hydroxyalkyl, alkoxy, alkoxyalkyl, cyano, halide, haloalkyl, ester, thiol, thiol ester, carboxyl, carboxyalkyl, sulfonate, sulfoxide, substituted, unsubstituted, linear or branched alkyl, substituted, unsubstituted, linear or branched alkynyl, amino, amine, amide, sulfinate;
- substituted or unsubstituted aryl;
- Z may be hydrogen, substituted, unsubstituted, linear or branched alkyl, substituted, unsubstituted, linear or branched alkenyl, allyl, acetyl or substituted or unsubstituted aryl;
- m is an integer of 0 to 6 with the proviso that when m is 0 a covalent bond is formed between the S and 0 of —O—(Z)n;
- and n is an integer of 0 or 1 when n=0 the oxygen carriers a negative charge.
3 more elements
A method comprising:
- a) providing a substrate;
- and
- b) electrolessly depositing copper on the substrate using an electroless copper composition comprising one or more sources of copper ions, one or more chelating agents and one or more reducing agents having formula:
- wherein Xy+ is a neutralizing counter cation of formula (I), where y+ is an integer of one or greater and may be H+, ammonium cation, quaternary ammonium cation, sulfonium cation, phosphonium cation, pyradinium cation, monovalent metal cation, multivalent metal cation or divalent organometallic cation;
- R and R′ are independently hydroxy, hydroxyalkyl, alkoxy, alkoxyalkyl, cyano, halide, haloalkyl, ester, thiol, thiol ester, carboxyl, carboxyalkyl, sulfonate, sulfoxide, substituted, unsubstituted, linear or branched alkyl, substituted, unsubstituted, linear or branched alkynyl, amino, amine, amide, sulfinate;
- substituted or unsubstituted aryl;
- Z may be hydrogen, substituted, unsubstituted, linear or branched alkyl, substituted, unsubstituted, linear or branched alkenyl, allyl, acetyl or substituted or unsubstituted aryl;
- m is an integer of 0 to 6 with the proviso that when m is 0 a covalent bond is formed between the S and 0 of —O—(Z)n;
- and n is an integer of 0 or 1 when n=0 the oxygen carriers a negative charge.
6 more elements
A method comprising:
- a) providing a printed wiring board comprising a plurality of through-holes;
- b) desmearing the through-holes;
- and
- c) depositing copper on walls of the through-holes using an electroless copper composition comprising one or more sources of copper ions, one or more chelating agents one or more reducing agents having formula:
- wherein Xy+ is a neutralizing counter cation of formula (I), where y+ is an integer of one or greater and may be H+, ammonium cation, quaternary ammonium cation, sulfonium cation, phosphonium cation, pyradinium cation, monovalent metal cation, multivalent metal cation or divalent organometallic cation;
- R and R′ are independently hydroxy, hydroxyalkyl, alkoxy, alkoxyalkyl, cyano, halide, haloalkyl, ester, thiol, thiol ester, carboxyl, carboxyalkyl, sulfonate, sulfoxide, substituted, unsubstituted, linear or branched alkyl, substituted, unsubstituted, linear or branched alkynyl, amino, amine, amide, sulfinate;
- substituted or unsubstituted aryl;
- Z may be hydrogen, substituted, unsubstituted, linear or branched alkyl, substituted, unsubstituted, linear or branched alkenyl, allyl, acetyl or substituted or unsubstituted aryl;
- m is an integer of 0 to 6 with the proviso that when m is 0 a covalent bond is formed between the S and 0 of —O—(Z)n;
- and n is an integer of 0 or 1 when n=0 the oxygen carriers a negative charge.
7 more elements
Dependencies are inferred from the claim text.