Devices and methods for passivating a flexible substrate in a coating process
AssigneeApplied Materials, Inc.
InventorsAlexander Wolff, Gerd Hoffmann
Life of this patent
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Abstract
An apparatus for passivating a coating of a flexible substrate includes a coating chamber for coating the flexible substrate, a chamber separation element, the chamber separation element being arranged for separating the coating chamber from a further chamber, a coating drum, the coating drum and the chamber separation element forming a gap, and a gas inlet, the gas inlet being arranged within the chamber separation element for supplying oxygen into the gap.
Claims19
Apparatus for passivating a coating at a flexible substrate, comprising:
- a coating chamber for coating the flexible substrate;
- a chamber separation element, the chamber separation element being arranged for separating the coating chamber from a further chamber;
- and
- a coating drum, the coating drum and the chamber separation element forming a gap;
- a gas inlet, the gas inlet being arranged within the chamber separation element for supplying oxygen into the gap.
A method for passivating a coating of a flexible substrate in an apparatus comprising a coating chamber for coating the flexible substrate;
- a chamber separation element, the chamber separation element being arranged for separating the coating chamber from a further chamber;
- a coating drum, the coating drum and the chamber separation element forming a gap;
- and a gas inlet, the gas inlet being arranged within the chamber separation element;
- comprising:
- supplying oxygen through the as inlet into the gap.
Dependencies are inferred from the claim text.