US 2014/0178567 A1 · Systems and Methods for Processing Vapor

Abstract

A system for processing vapor. The system includes a vapor source for producing a vapor and an outlet conduit coupled to the vapor source for carrying the vapor from the vapor source. Downstream of the vapor source the outlet conduit separates into a vapor bypass conduit and a vapor feed conduit. The system further includes a first vapor control valve disposed in the bypass conduit, a second vapor control valve disposed in the feed conduit, a first vacuum chamber connected fluidically coupled to the bypass conduit, and a second vacuum chamber connected fluidically coupled to the feed conduit.

Claims20

Dependent claims

A vapor processing system comprising:

a vapor source for producing a vapor;
an outlet conduit connected to the vapor source for carrying the vapor from the vapor source, wherein downstream of the vapor source the outlet conduit separates into a vapor bypass conduit and a vapor feed conduit;
a first vapor control valve disposed in the bypass conduit;
a first vacuum chamber connected to the bypass conduit, and disposed downstream of the first vapor control valve;
a second vacuum chamber connected to the feed conduit;
and
a controller operatively coupled to the first vapor control valve so that it controls the flow of vapor to the first vacuum chamber.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

14/232,671Filed 1 Aug 2012

Priority

5 Aug 2011

Published

26 Jun 2014

Term ends

Not estimatedThe source records don’t support an estimate.

Classification16 codes

C23C 16/45561
Characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber: gas plumbing upstream…
B01D 3/10
Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping: vacuum distillation
B05D 1/60
Processes for applying liquids or other fluent materials: deposition of organic layers from vapour phase
C23C 14/12
Characterised by the coating material: organic material

Systems and Methods for Processing Vapor

Life of this patent

Systems and Methods for Processing Vapor

Life of this patent

Abstract

Claims20