Pump arrangement comprising a safety valve arrangement

A pump arrangement comprising:

• a microfluidic pump comprising a pump inlet and a pump outlet, wherein the microfluidic pump is configured to pump a fluid from the pump inlet to the pump outlet, wherein the pump inlet and an inlet of the pump arrangement are fluidically connected;
• a safety valve arrangement having a first safety valve, the first safety valve being arranged between the pump outlet and an outlet of the pump arrangement and comprising a first valve seat and a first valve lid;
• wherein the outlet of the pump arrangement and a first fluid region are fluidically connected and are formed in a first part of the pump arrangement,
• wherein the first valve lid is formed in a second integrated part of the pump arrangement,
• wherein the first valve seat, the pump outlet and the pump inlet are patterned in a second surface of a third integrated part of the pump arrangement, and
• wherein the second integrated part is arranged between the first integrated part and the third part of the pump arrangement, wherein the first fluid region is adjacent to the first valve lid, and wherein a pressure in the first fluid region has a closing effect on the first safety valve.