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US 2014/0178223 A1Published application
Micro pump
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsSang Jin KIM, Bo Sung KU
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Abstract
There is provided a micro pump, including: a channel forming substrate having an inlet and an outlet; an upper substrate connected to the channel forming substrate and having a first hole connected to the inlet and a second hole connected to the outlet; and an adhesive member disposed between the channel forming substrate and the upper substrate to bond the channel forming substrate and the upper substrate and having a first valve opening and closing the inlet and a second valve opening and closing the outlet.
Claims23
A micro pump, comprising:
- a channel forming substrate having an inlet and an outlet;
- an upper substrate connected to the channel forming substrate and having a first hole connected to the inlet and a second hole connected to the outlet;
- and
- an adhesive member disposed between the channel forming substrate and the upper substrate to bond the channel forming substrate and the upper substrate and having a first valve opening and closing the inlet and a second valve opening and closing the outlet.
1 more element
A micro pump, comprising:
- a lower substrate having a pressure chamber formed therein;
- a channel forming substrate having an inlet and an outlet formed therein, the inlet and the outlet being connected to the pressure chamber;
- an upper substrate connected to the channel forming substrate, and having a first hole connected to the inlet and a second hole connected to the outlet;
- and
- an adhesive member disposed between the channel forming substrate and the upper substrate to bond the channel forming substrate and the upper substrate and having a first valve opening and closing the inlet and a second valve opening and closing the outlet.
2 more elements
Dependencies are inferred from the claim text.