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US 2014/0177994 A1Published application
Hybrid optical modulator for photonic integrated circuit devices
AssigneeAlcatel-Lucent USA Inc.
InventorLong Chen
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Abstract
An apparatus comprising an optical modulator, wherein the optical modulator comprises a planar substrate, a first III-V semiconductor layer on the substrate, and a silicon layer on the substrate. The optical modulator includes a planar semiconductor optical waveguide having a hybrid optical core, the hybrid optical core including vertically adjacent lateral portions of the first III-V semiconductor layer and the silicon layer.
Claims16
An apparatus, comprising:
- an optical modulator, wherein the optical modulator comprises:
- a planar substrate;
- a first III-V semiconductor layer on the substrate;
- a silicon layer on the substrate;
- and
- wherein the optical modulator includes a planar semiconductor optical waveguide having a hybrid optical core, the hybrid optical core including vertically adjacent lateral portions of the first III-V semiconductor layer and the silicon layer.
3 more elements
A method, comprising:
- forming an optical modulator, including:
- forming a planar substrate;
- forming a first III-V semiconductor layer on the substrate;
- forming a silicon layer on the substrate;
- and
- wherein the optical modulator includes a planar semiconductor optical waveguide having a hybrid optical core, the hybrid optical core including vertically adjacent lateral portions of the first III-V semiconductor layer and the silicon layer.
3 more elements
Dependencies are inferred from the claim text.