Recipe generation apparatus, inspection support apparatus, inspection system, and recording media

An inspection support apparatus used in relation to an inspection apparatus for inspecting a pattern corresponding to a plurality of cells using image data obtained by irradiating a light or charged particle beam onto a sample on which the pattern is formed, the inspection support apparatus comprising:

• a storage means for storing design layout data of the pattern;
• a processor for executing predetermined arithmetic processing on the design layout data;
• and
• a display for displaying a processed result by the processor,
• wherein the processor analyzes a reference relationship between the plurality of cells, and
• the display displays a reference frequency between the plurality of cells together with a layout of the pattern.

An inspection system configured by including at least an inspection apparatus for inspecting a pattern corresponding to a plurality of cells using image data obtained by irradiating a light or charge particle beam onto a sample on which the pattern is formed, a recipe generation apparatus for generating an inspection recipe of the inspection apparatus, and a display,

• wherein the recipe generation apparatus includes:
• a storage means for storing design layout data of the pattern;
• and
• a processor for performing predetermined data arithmetic processing on the design layout data,
• wherein the inspection apparatus includes:
• an input part for acquiring the inspection recipe generated by the recipe generation apparatus,
• wherein the processor analyzes a reference relationship between the plurality of cells, and
• the display displays a reference frequency between the plurality of cells together with a layout of the pattern.

A recording medium which stores a program to be executed in a recipe generation apparatus that generates an inspection recipe of an inspection apparatus for inspecting a pattern corresponding to a plurality of cells using image data obtained by irradiating a light or charged particle beam onto a sample on which the pattern is formed, the recipe generation apparatus including memory, a processor and a display,

• wherein a physical arrangement of a pattern corresponding to an arbitrary cell among the plurality of cells on the sample is obtained by making the processor execute the following processing:
• processing of detecting a cell contained in the design layout data;
• processing of finding a hierarchical relationship between the detected cells by detecting links between the cells;
• processing of finding a number of cells to which a certain cell refers by counting the number of links between the cells;
• and
• processing of instructing to the display for displaying the number of cells referred by the certain cell together with a layout of the pattern.