Target structure and x-ray generating apparatus
AssigneeCanon Kabushiki Kaisha
InventorsYasue Sato, Takao Ogura, Kazuyuki Ueda, Ichiro Nomura
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Abstract
In a target structure according to the present invention, a target is provided on a central area of an insulating substrate, and a first conductive member for supplying a voltage to the target is provided on a peripheral area of the insulating substrate which is exclusive of an area overlapping the target and is not covered by the target, so that the first conductive member is in contact with and electrically connected to the peripheral portion of the target. Consequently, it is possible to easily form a voltage supply line to the target without preventing diffusion of a heat generated in the target to the substrate and while suppressing emission of an unnecessary X-ray.
Claims9
A target structure which is equipped with an insulating substrate and a target provided on one surface of the insulating substrate, wherein
- the target is provided on a central area of the insulating substrate, and
- a first conductive member for supplying a voltage to the target is provided on a part of a peripheral area of the insulating substrate which is exclusive of an area overlapping with a central portion of the target and is not covered by the target, so that the provided first conductive member is connected to the target.
Dependencies are inferred from the claim text.