3d imaging with multiple irradiation frequencies

An imaging device comprising:

• a radiation source to emit source radiation;
• a first target electrode to generate first radiation having a first frequency in response to the source radiation;
• a second target electrode to generate second radiation having a second frequency in response to the source radiation;
• a first collimation arrangement to direct the first radiation;
• and
• a second collimation arrangement to direct the second radiation.

A system for imaging a semiconductor device comprising:

• a display device;
• an imaging device to irradiate the semiconductor device with a first frequency of electromagnetic radiation and irradiate the semiconductor device with a second frequency of electromagnetic radiation;
• and
• a control module coupled to the display device and the imaging device to obtain a first radiation response generated by the semiconductor device in response to the first frequency of electromagnetic radiation, obtain a second radiation response generated by the semiconductor device in response to the second frequency of electromagnetic radiation, generate a three-dimensional image of the semiconductor device based on the first radiation response and the second radiation response, and present the three-dimensional image on the display device.