Single-body electrostatic chuck
AssigneeApplied Materials, Inc.
InventorsSenh Thach, Dmitry Lubomirsky, Jennifer Y. Sun, Konstantin Makhratchev
Life of this patent
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Abstract
An electrostatic chuck includes a thermally conductive base having a plurality of heating elements disposed therein. A metal layer covers at least a portion of the thermally conductive base, wherein the metal layer shields the plurality of heating elements from radio frequency (RF) coupling and functions as an electrode for the electrostatic chuck. A plasma resistant dielectric layer covers the metal layer.
Claims20
An electrostatic chuck comprising:
- a thermally conductive base;
- a plurality of heating elements in the thermally conductive base;
- a metal layer covering at least a portion of the thermally conductive base, wherein the metal layer shields the plurality of heating elements from radio frequency (RF) coupling and functions as an electrode for the electrostatic chuck;
- and
- a plasma resistant dielectric layer covering the metal layer.
A method of manufacturing an electrostatic chuck comprising:
- providing a thermally conductive base;
- forming a plurality of recesses in an upper surface of the thermally conductive base;
- forming a plurality of auxiliary heating elements in the plurality of recesses;
- filling the plurality of recesses with a dielectric material;
- depositing a metal layer over the upper surface of the thermally conductive base, wherein the metal layer shields the plurality of auxiliary heating elements from radio frequency (RF) coupling and functions as an electrode for the electrostatic chuck;
- and
- covering the metal layer with a plasma resistant dielectric layer.
An electrostatic chuck having been manufactured by a manufacturing process comprising:
- providing a thermally conductive base;
- forming a plurality of recesses in an upper surface of the thermally conductive base;
- forming a plurality of auxiliary heating elements in the plurality of recesses;
- filling the plurality of recesses with a dielectric material;
- depositing a metal layer over the upper surface of the thermally conductive base, wherein the metal layer shields the plurality of auxiliary heating elements from radio frequency (RF) coupling and functions as an electrode for the electrostatic chuck;
- and
- covering the metal layer with a plasma resistant dielectric layer.
Dependencies are inferred from the claim text.