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US 2014/0176943 A1Published application
Surface defect inspection method and apparatus
AssigneeHitachi High-Technologies Corporation
InventorsYoshimasa OSHIMA, Toshiyuki NAKAO, Shigeru MATSUI
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Abstract
A surface defect inspection apparatus and method is provided which illuminates a plurality of beams set to different intensity values to a sample. Scattered light from the plurality of beams is detected and processed to analyze the surface defects.
Claims19
A defect inspection apparatus comprising:
- An illumination optical system configured to illuminate a plurality of beams set to different intensity values to a sample;
- a detection optical system configured to detect a scattered light from the sample;
- and
- a processing system configured to process a signal from the scattered light.
1 more element
A defect inspection method comprising:
- illuminating a plurality of beams set to different intensity values to a sample;
- detecting a scattered light from the sample;
- and
- processing a signal from the scattered light.
1 more element
Dependencies are inferred from the claim text.